Reducing aberration in optical systems comprising cubic crystalline optical elements

ABSTRACT

An optical system includes multiple cubic crystalline optical elements and one or more polarization rotators in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements. In one embodiment, all cubic crystalline optical elements are oriented with identical three dimensional cubic crystalline lattice directions, a 90° polarization rotator divides the system into front and rear groups such that the net retardance of the front group is balanced by the net retardance of the rear group. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.

PRIORITY APPLICATION

[0001] This application claims the benefit of priority under 35 U.S.C.§119(e) to U.S. Provisional Patent Application No. ______ (AttorneyDocket No. OPTRES.02PR2), filed May 31, 2002 and entitled “Structuresand Methods for Reducing Aberrations in Optical Systems”, U.S.Provisional Patent Application No. 60/367,911, filed Mar. 26, 2002 andentitled “Structure and Method for Improving Optical Systems”, U.S.Provisional Patent Application No. 60/363,808, filed Mar. 12, 2002, andentitled “Correction of Intrinsic Birefringence Using Rotators”, U.S.Provisional Patent Application No. 60/332,183, filed Nov. 21, 2001, andentitled “Compensation for Intrinsic Birefringence Effects in CubicCrystalline Optical Systems” as well as U.S. Provisional PatentApplication No. 60/335,093, filed Oct. 30, 2001, and entitled “IntrinsicBirfringence Compensation”, which are each hereby incorporated byreference herein in their entirety.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to reducing aberration in opticalsystems. More particularly, the present invention relates to anapparatus and method for reducing polarization aberrations in opticalsystems such as lithographic imaging systems comprising cubiccrystalline optical elements having intrinsic birefringence.

[0004] 2. Description of the Related Art

[0005] In order to increase levels of device integration for integratedcircuit and other semiconductor components, device features havingsmaller and smaller dimensions are desired. In today's rapidly advancingsemiconductor manufacturing industry, the drive is to produce suchreduced device features in a reliable and repeatable manner.

[0006] Optical lithography systems are commonly used to form images ofdevice patterns upon semiconductor substrates in the fabricationprocess. The resolving power of such systems is proportional to theexposure wavelength; therefore, it is advantageous to use exposurewavelengths that are as short as possible. For sub-micron lithography,deep ultraviolet light having a wavelength of 248 nanometers or shorteris commonly used. Wavelengths of interest include 193 and 157nanometers.

[0007] At ultraviolet or deep ultraviolet wavelengths, the choice ofmaterials used to form the lenses, windows, and other optical elementsof the lithography system is significant. Such optical elementspreferably are substantially optically transmissive at short wavelengthsused in these lithography systems.

[0008] Calcium fluoride and other cubic crystalline materials such asbarium fluoride, lithium fluoride, and strontium fluoride, representsome of the materials being developed for use as optical elements for157 nanometer lithography, for example. These single crystal fluoridematerials have a desirably high transmittance compared to ordinaryoptical glass and can be produced with good homogeneity.

[0009] Accordingly, such cubic crystalline materials are useful asoptical elements in short wavelength optical systems including but notlimited to wafer steppers and other projection printers used to producesmall features on substrates such as semiconductor wafers and othersubstrates used in the semiconductor manufacturing industry. Inparticular, calcium fluoride finds particular advantage in that it is aneasily obtained cubic crystalline material and large high purity singlecrystals can be grown. These crystals, however, are expensive, andcertain orientations, such as the <100> and <110> crytallographicorientations are more expensive than others, like the <111> crystalorientation.

[0010] A primary concern regarding the use of cubic crystallinematerials for optical elements in deep ultraviolet lithography systemsis anisotropy of refractive index inherent in cubic crystallinematerials; this effect is referred to as “intrinsic birefringence.” Forlight propagating through a birefringent material, the refractive indexvaries as a function of polarization and orientation of the materialwith respect to the propagation direction and the polarization.Accordingly, different polarization components propagate at differentphase velocities and undergo different phase shifts upon passing throughan optical element comprising birefringent material.

[0011] When used for construction of elements of an optical system, thebirefringent properties of these cubic crystalline materials may producewavefront aberrations that significantly degrade image resolution andintroduce field distortion. These aberrations are particularlychallenging for optical instruments employed in photolithography intoday's semiconductor manufacturing industry where high resolution andtight overlay requirements are demanded by an emphasis on increasedlevels of integration and reduced feature sizes.

[0012] It has been recently reported [J. Burnett, Z. H. Levine, and E.Shipley, “Intrinsic Birefringence in 157 nm materials,” Proc. 2^(nd)Intl. Symp. on 157 nm Lithography, Austin, Intl. SEMATECH, ed. R.Harbison, 2001] that cubic crystalline materials such as calciumfluoride, exhibit intrinsic birefringence that scales as the inverse ofthe square of the wavelength of light used in the optical system. Themagnitude of this birefringence becomes especially significant when theoptical wavelength is decreased below 250 nanometers and particularly asit approaches 100 nanometers. Of particular interest is the effect ofintrinsic birefringence at the wavelength of 157 nanometers (nm), thewavelength of light produced by an F₂ excimer laser, which is favored inthe semiconductor manufacturing industry. Strong intrinsic birefringenceat this wavelength has the unfortunate effect of producing wavefrontaberrations that can significantly degrade image resolution andintroduce distortion of the image field, particularly for sub-micronprojection lithography in semiconductor manufacturing.

[0013] Thus, there is a need to reduce these wavefront aberrationscaused by intrinsic birefringence, which can degrade image resolutionand cause image field distortion. Such correction is particularlydesirable in projection lithography systems comprising cubic crystallineoptical elements using light having wavelengths in the deep ultravioletrange.

SUMMARY OF THE INVENTION

[0014] One aspect of the invention comprises an optical apparatus havingan output. This optical apparatus comprises one or more optical elementswith polarization aberrations that alter the output of the apparatus.The optical apparatus further comprises polarization transformationoptics, e.g., polarization rotation optics, configured to reduce thecontributions of the polarization aberrations to the output.

[0015] Another aspect of the invention comprises an optical systemcomprising at least one cubic crystalline optical element aligned alongan optical axis and polarization rotation optics inserted along thisoptical axis. The at least one cubic crystalline optical element isbirefringent and imparts retardance on a beam of light propagatingthrough the optical system along the optical axis. The polarizationrotation optics rotates the polarization of the beam of light to reducethe retardance.

[0016] In another aspect of the invention, an optical apparatus havingan output comprises a plurality of optical elements divided into firstand second sections and polarization conversion optics disposed betweenthe first and second optical sections. The first and second sectionshave associated therewith polarization aberrations originating fromvariation in optical properties of the respective sections withpolarization. The polarization aberrations affect the output of theoptical apparatus. The polarization aberrations associated with thefirst section are substantially similar to the polarization aberrationsassociated with the second section. The polarization conversion opticsare configured to transform an input polarization into a orthogonaloutput polarization such that the polarization aberrations associatedwith the first section at least partially offset the polarizationaberrations associated with the second section. The effects ofpolarization aberrations on the output of the optical system are therebyreduced.

[0017] Another aspect of the invention comprises an optical imagingsystem for producing an optical image. This optical imaging systemincludes one or more powered optical elements with polarizationaberration that degrades the optical image. The optical imaging systemfurther comprises a polarization rotation system configured to reducethe contributions of the polarization aberration to the degradation ofthe optical image.

[0018] Still another aspect of the invention comprises an opticalapparatus for transmitting a light. This optical apparatus comprises aplurality of optical elements having birefringence that introducesretardance to the light and a circular retarder having orthogonalcircular eigenpolarization states. The circular retarder produces phasedelay between the eigenpolarization states substantially equivalent toan odd number of quarter wavelengths of the light.

[0019] In yet another aspect of the invention, an optical systemincludes a first optics section for receiving a beam of light having apolarization that is propagating therethrough and a second opticssection outputting said beam of light. The first and second opticssections introduce phase delay between orthogonal polarization states ofthe beam of light. The optical system further includes means forrotating the polarization of the beam to reduce total phase delaybetween the polarization states of the beam of light output from theoptical system.

[0020] Another aspect of the invention comprises a method of opticallyimaging. In this method, light is collected from an object using atleast one optical element which introduces first polarizationaberrations. The polarization of the light is rotated. The lightcollected is propagated through at least one element thereby introducingsecond polarization aberrations which at least partially cancel thefirst polarization aberrations.

[0021] In another aspect of the invention, a method includes propagatinglight having first and second orthogonal polarization components througha first optics section having first and second eigenpolarization states.The first polarization component is converted into the secondpolarization component and the second polarization component isconverted into the first polarization component. After performing theconversion, light is propagated through a second optics section havingfirst and second eigenpolarization states.

[0022] Still another aspect of the invention comprises a method ofpropagating light. Light having first and second orthogonal polarizationcomponents is propagated through first optics comprising one or morecubic crystalline optical elements. The first optics has fast and sloweigenpolarization states. The first and second orthogonal polarizationcomponents correspond to the fast and slow eigenpolarization states. Thelight is propagated through second optics comprising one or more cubiccrystalline optical elements. The second optics has fast and sloweigenpolarization states substantially similar in magnitude andorientation to the respective fast and slow eigenpolarization states ofthe first optics. Prior to propagating the light through the secondoptics, the polarization of the light is altered such that the first andsecond orthogonal polarization components correspond to the slow andfast eigenpolarization states, respectively, of the second optics.

[0023] Another aspect of the invention comprises a method which includestransmitting a beam of light having a polarization corresponding to thesum of two orthogonal polarization states through at least onebirefringent optical element thereby introducing phase delay between theorthogonal polarization states of the beam of light. The polarization ofthe beam of light is rotated. The light having rotated polarization istransmitted through at least one birefringent element therebyintroducing additional phase delay between the orthogonal polarizationstates to reduce the relative phase difference between the polarizationstates of the beam of light.

[0024] Yet another aspect of the invention comprises a method forforming an optical system with reduced polarization aberration. Themethod includes providing a plurality of optical elements along a commonoptical path and inserting polarization rotation optics in said commonoptical path. The optical system is thereby divided into first andsecond parts. The first and second parts have associated therewith firstand second polarization aberrations, respectively. The polarizationrotation optics rotates the polarization of light transmittedtherethrough. The optical elements and the polarization rotation opticsare selected and arranged to reduce net polarization aberrationsproduced by the plurality of optical elements.

[0025] Another aspect of the invention comprises a method of reducingthe retardance caused by intrinsic birefringence in an optical systemcomprising cubic crystalline optical elements. This method comprisesintroducing polarization rotation optics into the optical system. Thepolarization rotation optics are configured to rotate the polarizationof a light beam passing therethrough by odd integer multiples of about90 degrees, such that retardance introduced into an optical beamtransmitted through at least one of the cubic crystalline opticalelement is substantially offset by retardance introduced into theoptical beam upon transmitting the beam through at least one of thecubic crystalline optical elements after rotating the polarization ofthe beam.

[0026] Another aspect of the invention comprises a photolithographytool. This photolithography tool includes a light source outputtinglight for illuminating a reticle and condenser optics positioned toreceive light from the light source. The condenser optics are positionedto direct an optical beam formed from the light through the reticle. Thephotolithography tool further comprises projection optics configured toform an image of the reticle onto a substrate. The projection opticscomprise one or more cubic crystalline lens elements receiving thedirected optical beam propagated through the reticle and polarizationrotation optics positioned along a common optical pathway with thereticle and the one or more cubic crystalline lens elements. The one ormore cubic crystalline lens elements has intrinsic birefringence whichintroduces retardance into the optical beam. The polarization rotationoptics rotates the polarization of the optical beam transmitted throughthe one or more cubic crystalline lens elements.

[0027] Another aspect of the invention comprises a method of forming asemiconductor device. In this method, a beam of light is propagatedthrough a reticle. An optical image of the reticle is formed bydirecting the beam of light into a first part of a projection lens. Thefirst part of the projection lens includes one or more refractiveoptical elements, which cause the beam of light to become aberrated as aresult of first polarization aberrations introduced by the first part ofthe projection lens. These first polarization aberrations result fromvariation in an optical property with polarization. The polarization ofthe beam of light is rotated. The beam of light is then propagatedthrough a second part of the projection lens. The second part of theprojection lens includes one or more refractive optical elements. Thissecond part of the projection lens is selected to introduce secondpolarization aberrations which at least partially cancel the firstpolarization aberrations, the second polarization aberrations alsoresulting from variation in an optical property with polarization. Asubstrate is positioned such that the optical image formed by the beamof light output by the projection lens, is formed on the substrate.

[0028] In another aspect of the invention, a semiconductor device isformed according to a process which includes depositing a photosensitivematerial over a semiconductor wafer, illuminating a mask pattern, andtransmitting a beam of light having first and second orthogonalpolarization states along an optical path from the mask pattern throughat least one optical element. The optical element has instrinsicbirefringence such that the first polarization state is phase delayedwith respect to the second polarization state. The first and secondorthogonal polarization states of said beam of light are rotated and thebeam of light, having rotated the first and second orthogonalpolarization states, is transmitted through at least one birefringentelement. In this manner, the second polarization state is phase delayedwith respect to the first polarization state to reduce the relativephase difference between the first and second orthogonal polarizationstates of the beam of light. After said beam of light is transmittedthrough the at least one birefringent element, the beam is projectedonto said photosensitive material over said semiconductor wafer.Portions of photosensitive material are removed to form a pattern in thephotosensitive material that resembles the mask pattern, and thesemiconductor wafer having the patterned photosensitive material thereonis processed.

[0029] Yet another aspect of the invention comprises a photolithographytool that includes a light source outputting light for illuminating areticle and condenser optics positioned to receive light from the lightsource. The condenser optics is positioned to direct an optical beamformed from the light through the reticle. The photolithography toolfurther comprises projection optics configured to form an image of thereticle onto a substrate. The condenser optics includes one or morecubic crystalline optical elements which receive the light from thelight source. The one or more cubic crystalline optical elements haveintrinsic birefringence which introduces retardance into the opticalbeam. The condenser further includes polarization rotation opticspositioned along a common optical pathway through the one or more cubiccrystalline optical elements. The polarization rotation optic rotatesthe polarization of the light transmitted through the one or more cubiccrystalline optical elements.

[0030] Another aspect of the invention comprises an optical systemcomprising one or more cubic crystalline lens elements having intrinsicbirefringence and a substantially optically transmissive elementcomprising a cubic crystalline central portion and a clamp securedthereto. The cubic crystalline central portion has a birefringenceinduced by compressive force imparted by the clamp. This birefringenceincreases radially away from an optical axis passing through the centralportion. The compressive force produces an amount of radially increasingbirefringence to at least partially offset the intrinsic birefringenceof the one or more cubic crystalline lens elements. The substantiallyoptically transmissive element may comprise a lens element. The cubiccrystalline central portion may comprise cubic crystalline fluoridematerial such as cubic crystalline calcium fluoride. In variousembodiments, the birefringence may increase quadratically from theoptical axis. The clamp may also comprise a hoop. Furthermore, theoptical system may include polarization rotation optics. Additionally,in some embodiments, a common optical axis may extend through the one ormore cubic crystalline lens elements and through the substantiallyoptically transmissive element and the birefringence induced by thecompressive force may increase radially away from the common opticalaxis.

[0031] Another aspect of the invention comprises a method for reducingretardance in an optical beam passing through an optical systemcomprising one or more cubic crystal optical elements forming an opticalpath. In this method an amount of force is applied to at least one ofthe cubic crystalline optical elements to produce a stress-inducedbirefringence increasing in magnitude substantially symmetrically awayfrom a central axis passing therethrough. The amount of applied force isselected to produce a birefringence to reduce retardance in the opticalbeam passing therethrough. This stress-induced birefringence mayincrease monotonically with distance from the central axis. Thestress-induced birefringence may increase quadratically with distancefrom the central axis. In some embodiments, the method may furthercomprise selecting and orienting said optical elements so as to reducesaid retardance. Also, the method may include rotating the polarizationof the beam to reduce said retardance.

[0032] Yet another aspect of the invention comprises a method forreducing retardance in an optical beam propagating across an opticalpath through an optical system comprising one or more cubic crystal lenselements aligned along a common optical axis. The method comprisesreplacing one of the cubic crystal lens elements having a first opticalpower with two or more cubic crystal optical elements. The two or morecubic crystal optical elements together have a second optical powersubstantially matching the first optical power. The two or more cubiccrystal optical elements may also comprise cubic crystal having crystalaxes oriented differently. The two or more cubic crystal opticalelements may comprise cubic crystal having different crystal axissubstantially aligned along the common optical axis. One of the cubiccrystal lens elements may be replaced with a [100] and a [110] cubiccrystal element having respective [100] and [110] cubic crystal axessubstantially aligned with the common optical axis. One of the cubiccrystal lens elements may be replaced with a [111] and a [110] cubiccrystal element having respective [111] and [110] cubic crystal axessubstantially aligned with the common optical axis. Also, one of thecubic crystal lens elements may be replaced with a [100] and a [111]cubic crystal element having respective [100] and [111] cubic crystalaxes substantially aligned with the common optical axis. In someembodiments, the two or more cubic crystal optical elements may comprisecubic crystal having substantially the same crystal axis substantiallyaligned along the common optical axis, and the method may furthercomprise rotating said optical elements about the optical axis to anorientation that reduces retardance in said optical beam. One of thecubic crystal lens elements may be replaced with two [111] cubic crystallens elements having respective [111] cubic crystal axes substantiallyaligned with the common optical axis. Also, in various embodiments, themethod may further comprise inserting polarization rotation optics inthe optical path to rotate the polarization of the beam and to reducebeam retardance.

[0033] In still another aspect of the invention, an optical system thatoutputs light comprises first and second sections each comprising aplurality of symmetrically shaped calcium fluoride lens elements and aretardation reduction system between the first and second sections. Eachof the calcium fluoride lens elements is symmetrical about a respectiveoptical axis passing therethough. The plurality of symmetrically shapedcalcium fluoride lens elements are arranged along an optical path. Thesymmetrically shaped calcium fluoride lens elements in the first andsecond sections together comprise at least about 80% by weight [111]cubic crystalline calcium fluoride having a [111] crystal directionsubstantially parallel to the respective optical axis. This opticalsystem may comprise a photolithography system, for use for example, infabricating semiconductor and/or other devices. In various embodiments,the polarization reduction system reduces retardance produced by theplurality of symmetrically shaped calcium fluoride lens elements in eachof the first and second sections together, such that the retardance ofthe light output by said optical system onto a reference surface is lessthan or equal to about 0.020 waves rms at each location on the referencesurface. In some embodiments, the retardance of the light output by saidoptical system onto a reference surface is less than or equal to about0.010 waves rms at each location on the reference surface. Thisreference surface may correspond, for example, to the exit pupil of theoptical system, to a wafer, to the format of a photolithographyinstrument but it is not limited to these examples.

[0034] In still another aspect of the invention, an optical imagingsystem includes a plurality of first lens elements arranged along acommon optical axis. The first lens elements comprise [111] cubiccrystalline calcium fluoride having a [111] crystal directionsubstantially along the common optical axis passing through the firstlens elements. The optical imaging system further comprises a pluralityof second lens elements arranged along the optical axis. The second lenselements comprise material selected from the group consisting of [100]cubic crystalline calcium fluoride having a [100] crystal directionsubstantially along the common optical axis passing through the secondlens element and [110] cubic crystalline calcium fluoride having a [110]crystal direction substantially along the common optical axis passingthrough the second lens element. The plurality of first lens elementsoutweigh the plurality of second lens elements at least by a ratio ofabout 4 to 1 and the plurality of first lens elements. The plurality ofsecond lens elements have positions, shapes, and rotational orientationsabout the common optical axis so that less than about 0.015 waves rms ofretardance is produced by the plurality of first lens element and theplurality of second lens elements together. This optical system maycomprise an optical lithography system.

[0035] In yet another aspect of the invention, an optical systemcomprises a first plurality of [111] cubic crystalline lens elements,polarization transforming optics, and a second plurality of [111] cubiccrystalline lens elements. The first plurality of [111] cubiccrystalline lens are arranged along an optical path for receiving anoptical beam having a first polarization. The polarization transformingoptics transform the first polarization of the optical beam into asecond polarization. The second plurality of [111] cubic crystallinelens elements are arranged along an optical path for receiving theoptical beam having the second polarization. Each of the [111] cubiccrystalline lens elements are symmetrical with respect to an opticalaxis passing though the respective lens element. Each of the [111] cubiccrystalline lens elements also comprise [111] cubic crystalline calciumfluoride having a [111] crystal axis substantially parallel to anoptical axis passing through the respective lens elements. Furthermore,the first plurality of [111] cubic crystalline lens elements imparts afirst retardance on the optical beam and the second plurality of [111]optical elements imparts a second retardance on the optical beam that atleast partially compensates for the first retardance. In variousembodiments, this optical system may be a photolithography system.

[0036] Another aspect of the invention comprises a method of reducingretardance in an optical beam propagating through at least one [111]optical element, the optical beam having a polarization corresponding tothe sum of two orthogonal polarization states. In this method, thepolarization of the optical beam is altered after the optical beam haspropagated through the at least one [111] optical element and hasacquired a first phase shift between the two orthogonal polarizationstates. The optical beam having altered polarization is propagatedthrough at least one [111] optical element thereby imparting a secondphase shift between the two orthogonal polarization states that at leastpartially counters the first phase shift. This method may be employed toreduce retardance in optical lithography systems.

[0037] In still another aspect of the invention, an optical systemcomprises a plurality of calcium fluoride lens elements each havingrespective optical axes. The plurality of calcium fluoride lens elementsare aligned along an optical path for propagation of light therethrough.Each of the calcium fluoride lens elements in the optical systemcomprises cubic crystalline calcium fluoride that is aligned with its[111] lattice direction substantially parallel with the respectiveoptical axes. This optical system may be a photolithography system foruse for example in fabricating semiconductor devices.

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] A more complete understanding of the present invention andadvantages thereof may be acquired by referring to the followingdescription, taken in conjunction with the accompanying drawings inwhich like reference numbers indicate like features and wherein:

[0039]FIG. 1 is a cross-sectional view of a projection optics for anexemplary lithography system comprising twenty-nine refractive opticalelements;

[0040]FIG. 2 is a schematic diagram of an exemplary lithography systemincluding a condenser lens and projection optics;

[0041]FIG. 3A is a graphical representation of variation ofbirefringence axis orientation with respect to a cubic crystal lattice;

[0042]FIG. 3B is a graphical representation of variation ofbirefringence magnitude with respect to a cubic crystal lattice;

[0043]FIG. 4 is a perspective view showing angular relationships betweenvarious directions through an exemplary cubic crystalline lattice;

[0044]FIG. 5A is a graphical illustration of birefringence magnitude andbirefringence axis orientation in angular space for a cubic crystallinematerial with respect to the [110] lattice direction and indicates theazimuthal orientations of the off-axis peak birefringence lobes;

[0045]FIG. 5B is a graphical illustration of birefringence magnitude andbirefringence axis orientation in angular space for a cubic crystallinematerial with respect to the [100] lattice direction and indicates theazimuthal orientations of the off-axis peak birefringence lobes;

[0046]FIG. 5C is a graphical illustration of birefringence magnitude andbirefringence axis orientation in angular space for a cubic crystallinematerial with respect to the [111] lattice direction and indicates theazimuthal orientations of the off-axis peak birefringence lobes;

[0047]FIG. 6 shows cross-sectional view of an exemplary arrangement ofan optical system referred to as a Dyson system comprising a refractiveelement and a reflective element aligned along an optical axis;

[0048]FIGS. 7A and 7B are graphical illustrations showing the netretardance across the system exit pupil for field points at the centerand edge of the field, respectively, for an optical system such as shownin FIG. 6, wherein the refractive element comprises cubic crystallinematerial having with its [111] crystal axis aligned along optical axis;

[0049]FIGS. 8A and 8B are graphical illustrations of the retardanceacross the system exit pupil for field points at the center and edge ofthe field, respectively, for an optical system such as shown in FIG. 6,wherein the refractive element comprises cubic crystalline materialhaving with its [100] crystal axis aligned along optical axis;

[0050]FIGS. 9A and 9B are graphical illustrations of the retardanceacross the system exit pupil for field points at the center and edge ofthe field, respectively, for an optical system such as shown in FIG. 6,wherein the refractive element comprises cubic crystalline materialhaving with its [110] crystal axis aligned along optical axis;

[0051]FIG. 10 is a cross-sectional view of the lens depicted in FIG. 6additionally including a 45° non-reciprocal Faraday rotator used torotate the polarization to reduce the harmful effects of intrinsicbirefringence;

[0052]FIG. 11A is a graphical illustration of net retardance across thepupil for the exemplary optical system shown in FIG. 10 with refractiveelement comprising cubic crystalline material with its [111] crystalaxis aligned substantially along the optical axis for the extreme fieldpoint.

[0053]FIG. 11B is a graphical illustration of net retardance across thepupil for the exemplary optical system shown in FIG. 10 with refractiveelement comprising cubic crystalline material with its [110] crystalaxis aligned substantially along the optical axis for the extreme fieldpoint.

[0054]FIG. 12 shows schematic cross-sectional view of an exemplarymixing rod, a non-imaging optical element;

[0055]FIG. 13 shows the net retardance across the exit pupil of themixing rod depicted in FIG. 12 comprising cubic crystalline materialwith the [111] crystal axis aligned with and corresponding to theoptical axis of the mixing rod assuming that the reflections from thewalls of the integrating rod do not change the polarization state of thelight propagating therein;

[0056]FIG. 14 depicts the polarization state of light across the exitpupil when a uniformly circularly polarized beam is incident on theentrance face of the mixing rod;

[0057]FIG. 15 is a schematic cross-sectional view of the mixing rod ofFIG. 12 further including a 90° polarization rotator centrally disposedwithin the mixing rod, the rotator possibly comprising a pair of quarterwaveplates on opposite sides of a halfwave plate;

[0058]FIG. 16 is a plot, on axis of angle (in degrees) and retardanceerror (in degrees) of the magnitude of retardance error as a function ofangle of incidence for 1 and 3 millimeter thick quarter wave platessurrounded by air;

[0059]FIG. 17 is a graphical illustration of the net retardance acrossthe exit pupil of the mixing rods shown in FIG. 15, which demonstratesthe reduction of the net retardance resulting from introduction of thepolarization rotator in the optical system;

[0060]FIG. 18 shows the polarization state of the light across the exitpupil when a uniformly circularly polarized beam is incident on theentrance face of the mixing rod shown in FIG. 15, which includes thepolarization rotator;

[0061]FIGS. 19A and 19B are graphical illustrations of the netretardance across the pupil for central and extreme field points,respectively, for the lens depicted in FIG. 1 wherein the opticalelements comprise cubic crystalline material with crystal axessubstantially identically aligned in three dimensions, with the opticalaxis extending along the [110] crystal lattice direction computed usinga peak birefringence magnitude corresponding to that of calcium fluorideat a wavelength of 157 nm;

[0062]FIGS. 20A and 20B are graphical illustrations of the netretardance across the pupil for central and extreme field points,respectively, for the lens depicted in FIG. 1 wherein the opticalelements comprise cubic crystalline material with crystal axessubstantially identically aligned in three dimensions, with the opticalaxis extending along the [100] crystal lattice direction computed usinga peak birefringence magnitude corresponding to that of calcium fluorideat a wavelength of 157 nm;

[0063]FIGS. 21A and 21B are graphical illustrations of the netretardance across the pupil for central and extreme field points,respectively, for the lens depicted in FIG. 1 wherein the opticalelements comprise cubic crystalline material with crystal axessubstantially identically aligned in three dimensions, with the opticalaxis extending along the [111] crystal lattice direction computed usinga peak birefringence magnitude corresponding to that of calcium fluorideat a wavelength of 157 nm;

[0064]FIG. 22 is a schematic illustration showing the exemplary lensdepicted in FIG. 1, in which the twenty-nine optical elements comprisecubic crystals having crystal axes substantially identically aligned inthree dimensions, with the optical axis extending along the [100]crystal lattice direction, further comprising −90° and 90° polarizationrotators;

[0065]FIGS. 23A and 23B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, due to intrinsic birefringence of the optical elementsbetween the −90° and 90° polarization rotators for the exemplary lensdepicted in FIG. 22;

[0066]FIGS. 24A and 24B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, due to intrinsic birefringence of the elements between the90° polarization rotator and the image plane for the exemplary lensdepicted in FIG. 22;

[0067]FIGS. 25A and 25B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for all lens elements and the 90° polarization rotatorexcluding the retardance of the −90° polarization rotator for theexemplary lens depicted in FIG. 22;

[0068]FIGS. 26A and 26B are graphical illustrations showing netretardance across the pupil at the central and extreme field points,respectively, for all elements and the 90° and −90° polarizationrotators for the exemplary lens depicted in FIG. 22;

[0069]FIG. 27 is a schematic illustration showing the exemplary lensdepicted in FIG. 22, in which the twenty-nine optical elements comprisecubic crystalline material substantially having crystal axessubstantially identically aligned in three dimensions, with the opticalaxis generally along the [100] crystal lattice direction, including −90°and 90° polarization rotators and an element which has a hoop appliedstress to induce radial stress birefringence therein;

[0070]FIG. 28A is a contour plot showing the radial variation inbirefringence in the first lens element having a hoop applied stress toinduce radial stress birefringence therein in the exemplary lensdepicted in FIG. 27, in which the variation is assumed to follow aquadratic profile with a peak birefringence of −6.95 nm/cm.

[0071]FIGS. 28B and 28C are graphical illustrations showing retardanceacross the pupil at the central and extreme field points, respectively,due to the birefringence induced by the hoop applied stress to the firstlens element following the reticle;

[0072]FIGS. 29A and 29B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for all elements, including the 90° and −90° rotators andthe retardance produced by applying a hoop stress to the first elementfollowing the reticle for the exemplary lens depicted in FIG. 27;

[0073]FIG. 30 is a plot on axis of radius (in millimeters) andretardance (in waves) illustrating the radial retardance variationacross an exemplary optical element when a compressive hoop stress isapplied around the perimeter of the element;

[0074]FIG. 31A is perspective view of a polarization rotator forrotating the polarization of any arbitrary polarization state by about90° about the propagation direction.

[0075]FIG. 31B is a plot of the variation in residual retardance for aquarter wave plate as a function of numerical angle, sin θ, (from 0.0 to0.5) and peak stress birefringence magnitude (from 1×10⁻⁶ to 1×10⁻³) fora polarization rotator constructed from single order wave platesemploying stress induced birefringence;

[0076]FIG. 32 is a cross-sectional view of an exemplary large formatrefractive projection lens comprising twenty-eight refractive opticalelements comprising cubic crystalline material;

[0077]FIGS. 33A, 33B, 33C, and 33D are contour plots showing theresidual wavefront error for the exemplary lens depicted in FIG. 32;

[0078]FIG. 33A shows the wavefront error for an input polarization inthe X direction (used with an exit pupil analyzer in the X direction)for the central field point;

[0079]FIG. 33B shows the wavefront error for an input polarization inthe X direction (used with an exit pupil analyzer in the X direction)for the extreme field point;

[0080]FIG. 33C shows the wavefront error for an input polarization inthe Y direction (used with an exit pupil analyzer in the Y direction)for the central field point;

[0081]FIG. 33D shows the wavefront error for an input polarization inthe Y direction (used with an exit pupil analyzer in the Y direction)for the extreme field point;

[0082]FIGS. 34A and 34B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 32for central and extreme field points, respectively, in which allelements are cubic crystals with crystal axes substantially identicallyaligned in three dimensions, with the optical axis extending generallyalong the [110] crystal lattice direction computed for a peakbirefringence magnitude corresponding to that of calcium fluoride at awavelength of 157 nm;

[0083]FIGS. 35A and 35B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 32at central and extreme field points, respectively, in which all elementsare cubic crystals with crystal axes substantially identically alignedin three dimensions, with the optical axis extending generally along the[100] crystal lattice direction computed for a peak birefringencemagnitude corresponding to that of calcium fluoride at a wavelength of157 nm;

[0084]FIGS. 36A and 36B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 32at central and extreme field points, respectively, in which all elementsare cubic crystals with crystal axes substantially identically alignedin three dimensions, with the optical axis extending generally along the[111] crystal lattice direction computed for a peak birefringencemagnitude corresponding to that of calcium fluoride at a wavelength of157 nm;

[0085]FIG. 37 is a schematic illustration showing the exemplary lensdepicted in FIG. 32, in which all the refractive optical elementscomprise cubic crystalline material with crystal axes substantiallyidentically aligned in three dimensions, with the optical axis extendingalong the [110] crystal lattice direction, comprising −90° and 90°polarization rotators with the two elements closest to the wafer derivedby splitting a single optical element, and having a toroidal surface;

[0086]FIGS. 38A and 38B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for the optical elements between the −90° and 90°polarization rotators for the exemplary lens depicted in FIG. 37;

[0087]FIGS. 39A and 39B are graphical illustrations showing netretardance across the pupil at the central and extreme field points,respectively, for the optical elements between the 90° polarizationrotator and the image plane for the exemplary lens depicted in FIG. 37;

[0088]FIGS. 40A and 40B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for all elements and the 90° and −90° polarizationrotators for the exemplary lens depicted in FIG. 37;

[0089]FIGS. 41A, 41B, 41C, and 41D are contour plots showing theresidual wavefront error for the exemplary lens depicted in FIG. 37;

[0090]FIG. 41A shows the wavefront error for an input polarization inthe X direction (used with an exit pupil analyzer in the X direction)for the central field point;

[0091]FIG. 41B shows the wavefront error for an input polarization inthe X direction (used with an exit pupil analyzer in the X direction)for the extreme field point;

[0092]FIG. 41C shows the wavefront error for an input polarization inthe Y direction (used with an exit pupil analyzer in the Y direction)for the central field point;

[0093]FIG. 41D shows the wavefront error for an input polarization inthe Y direction (used with an exit pupil analyzer in the Y direction)for the extreme field point;

[0094]FIG. 42 is a schematic illustration showing an exemplary largeformat catadioptric projection lens comprising nineteen poweredrefractive optical elements and one powered reflective optical element;

[0095]FIGS. 43A and 43B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 42for central and extreme field points, respectively, in which thenineteen powered refractive optical elements comprise cubic crystalswith crystal axes substantially identically aligned in three dimensions,with the optical axis extending generally along the [110] crystallattice direction computed for a peak birefringence magnitudecorresponding to that of calcium fluoride at a wavelength of 157 nm;

[0096]FIGS. 44A and 44B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 42for central and extreme field points, respectively, in which thenineteen powered refractive optical elements comprise cubic crystalswith crystal axes substantially identically aligned in three dimensions,with the optical axis extending along the [100] crystal latticedirection computed for a peak birefringence magnitude corresponding tothat of calcium fluoride at a wavelength of 157 nm;

[0097]FIGS. 45A and 45B are graphical illustrations showing netretardance across the pupil for the exemplary lens depicted in FIG. 42for central and extreme field points, respectively, in which thenineteen powered refractive optical elements comprise cubic crystalswith crystal axes substantially identically aligned in three dimensions,with the optical axis extending along the [111] crystal latticedirection computed for a peak birefringence magnitude corresponding tothat of calcium fluoride at a wavelength of 157 nm;

[0098]FIG. 46 is a schematic cross-sectional view showing an exemplarylens similar to that depicted in FIG. 29, with twenty powered refractiveelements comprising cubic crystalline material with crystal axessubstantially identically aligned in three dimensions, with the opticalaxis extending along the [111] crystal lattice direction, furthercomprising −90° and 90° polarization rotators, with the optical elementclosest to the wafer derived by splitting a single powered refractiveoptical element, and having a toroidal surface.

[0099]FIGS. 47A and 47B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for the optical elements between the −90° and 90°polarization rotators for the exemplary lens depicted in FIG. 46;

[0100]FIGS. 48A and 48B are graphical illustrations showing netretardance across the pupil for the central and extreme field points,respectively, for the optical elements between the 90° polarizationrotator and the image plane for the exemplary lens depicted in FIG. 46;and

[0101]FIGS. 49A and 49B are graphical illustrations showing netretardance across the pupil at the central and extreme field points,respectively, for all elements and the 90° and −90° polarizationrotators for the exemplary lens depicted in FIG. 46.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0102] It is well-known that cubic crystalline materials like calciumfluoride are favored in lithography systems, such as the highperformance photolithographic tools used in the semiconductormanufacturing industry. These crystalline materials are substantiallytransmissive to short wavelength UV light, which provides for highoptical resolution. It is also well-known, however, that these cubiccrystalline materials exhibit intrinsic birefringence, i.e., an inherentanisotropy in refractive index.

[0103] Birefringence, or double-refraction, is a property of refractivematerials in which the index of refraction is anisotropic, that is, theindex of refraction and thus the phase velocity is different fordifferent polarizations. For light propagating through a birefringentmaterial, the refractive index varies as a function of polarization andorientation of the material with respect to the polarization and thusthe propagation direction. Unpolarized light propagating through abirefringent material will generally separate into two beams withorthogonal polarization states. These beams may be referred to aseigenpolarization states or eigenpolarizations. The two beams propagatethrough the material with a different phase velocity. As the lightpasses through a unit length of the birefringent material, thedifference in phase velocity for the two ray paths will produced a phasedifference between the polarizations, which is conventionally referredto as retardance. These two states having different phase velocities maybe referred to as the slow and fast eigenpolarization states.

[0104] Birefringence is a unitless quantity, although it is commonpractice in the lithography community to express it in units ofnanometer per centimeter (nm/cm). Birefringence is a material property,while retardance is an optical delay between polarization states. Theretardance for a given ray through an optical system may be expressed innanometers (nm), or it may be expressed in terms of number of waves of aparticular wavelength.

[0105] In uniaxial crystals, such as magnesium fluoride or crystalquartz, the direction through the birefringent material in which the twoorthogonal polarizations travel with the same velocity is referred to asthe birefringence axis. The term optic axis is commonly usedinterchangeably with birefringence axis when dealing with singlecrystals. In systems of lens elements, the term optical axis usuallyrefers to the symmetry axis of the lens system. To avoid confusion, theterm optical axis will be used hereinafter only to refer to the symmetryaxis in a lens system. For directions through the material other thanthe birefringence axis, the two orthogonal polarizations will travelwith different velocities. For a given incident ray upon a birefringentmedium, the two refracted rays are commonly described as the ordinaryand extraordinary rays. The ordinary ray is polarized perpendicular tothe birefringence axis and refracts according to Snell's Law, and theextraordinary ray is polarized perpendicular to the ordinary ray andrefracts at an angle that depends on the direction of the birefringenceaxis relative to the incident ray and the amount of birefringence. Inuniaxial crystals, the birefringence axis is oriented along a singledirection, and the magnitude of the birefringence is constant throughoutthe material. Uniaxial crystals are commonly used for optical componentssuch as retardation plates and polarizers.

[0106] In contrast, however, cubic crystals have been shown to have botha birefringence axis orientation and magnitude that vary depending onthe propagation direction of the light with respect to the orientationof the crystal lattice. In addition to birefringence, which is thedifference in the index of refraction seen by the twoeigenpolarizations, the average index of refraction also varies as afunction of angle of incidence, which produces polarization independentphase errors.

[0107] Optical elements constructed from a cubic crystalline material,may cause a wavefront to be retarded as a result of the intrinsicbirefringence of the optical element. Moreover, the retardance magnitudeand orientation at a given point on the wavefront may vary, because thelocal propagation angle with respect to the material varies across thewavefront. Such variations in retardance across the wavefront may bereferred to as “retardance aberrations.” Retardance aberrations split auniformly polarized or unpolarized wavefront into two wavefronts withorthogonal polarizations. Again, these orthogonal wavefronts correspondto the eigenpolarization states. Each of the orthogonal wavefronts willexperience a different refractive index, resulting in differentwavefront aberrations.

[0108] Optical elements comprising cubic crystalline material thereforeintroduce additional aberrations that are correlated with polarization.These aberrations are generally referred to herein as polarizationaberrations and include the retardance aberrations described above whichresult from intrinsic birefringence in cubic crystalline materials.Additionally, these polarization aberrations include diattenuation, thevariation in optical transmission with polarization.

[0109] In cubic crystalline material, these polarization aberrations aresignificant enough to affect image quality in optical systems such asphotolithography system used in semiconductor fabrication processing.Accordingly, methods and apparatus for reducing these aberrations havesignificant value.

[0110] For ease of description, the cubic crystalline materials havecrystal axis directions and planes described herein using the well-knownMiller indices, which are integers with no common factors and that areinversely proportional to the intercepts of the crystal planes along thecrystal axes. Lattice planes are given by the Miller indices inparentheses, e.g. (100), and axis directions in the direct lattice aregiven in square brackets, e.g. [111]. The crystal lattice direction,e.g. [111], may also be referred to as the [111] crystal axis of thematerial or optical element. The (100), (010), and (001) planes areequivalent in a cubic crystal and are collectively referred to as the{100} planes.

[0111] As discussed above, for cubic crystalline materials, themagnitude of birefingence depends on the direction of light propagationthrough the crystal with respect to the orientation of the crystal axes.For example, light propagating through an exemplary cubic crystallineoptical element along the [110] crystal axis experiences the maximumbirefringence, while light propagating along the [100] crystal axisexperiences no birefringence.

[0112] Unfortunately, when constructing optical systems from cubiccrystalline materials such as calcium fluoride, the cost of the opticalelements contributes significantly to the total cost of these opticalsystems. In particular, the expense of the materials used to fabricatethe refractive optical elements drives up the cost. Moreover, opticalelements comprising calcium fluoride having an optical axis directedalong the [100] crystalline directions, which has the least intrinsicbirefringence, is the most expensive to fabricate. Blanks for creatingrefractive elements having an optical axis corresponding to the [110]are also expensive. In contrast, calcium fluoride grown (or cleaved) inthe [111] direction is significantly less expensive to fabricate.However, as described above, optical elements having an optical axisgenerally coinciding with the [111] direction of the crystallinematerial although least expensive, possess intrinsic birefringence whichintroduces wavefront aberrations that degrade performance of opticalsystems such as image quality and resolution. Although both [100] and[111] optical elements have zero birefringence along their respectiveoptical axes, for [100] optical elements, the birefringence increasemore slowly for rays further and further off-axis.

[0113]FIG. 1 is a schematic illustration of a projection optics sectionof an exemplary lithography system. The optical system 100 shown in FIG.1 is substantially similar to the optical system shown and describedEuropean Patent Application No. 0 828 172 by S. Kudo and Y. Suenaga, thecontents of which are incorporated herein by reference in theirentirety. This exemplary optical system 100 is a large format refractiveprojection lens having an NA of 0.75, a peak wavelength of 193.3 nm andproviding a 4×reduction. Such an optical system is intended to beexemplary only and other optical imaging systems and non-imaging systemsmay be used in other embodiments. The optical system 100, however, maybe the projection optics section of a lithography tool in one preferredembodiment. As shown in FIG. 1, the projection lens 100 is disposedbetween a reticle 102 and a substrate 104. The reticle 102 may beconsidered to correspond to the object field with the substrate 104 inthe image field of the projection lens 100.

[0114] The optical system 100 shown is a lens system, commonly referredto collectively as a “lens,” comprising a plurality of, i.e.,twenty-nine, individual lens elements L1-L29, an optical axis 106, andaperture stop (AS) 108. The reticle 102 includes a mask pattern, whichis to be projected onto a surface 110 of the substrate 104. Substrate104 may, for example, be a semiconductor wafer used in the semiconductormanufacturing industry, and surface 110 may be coated with aphotosensitive material, such as a photoresist commonly used in thesemiconductor manufacturing industry. Other substrates may be usedaccording to other embodiments and applications. Reticle 102 may be aphotomask suitable for various microlithography tools. Generallyspeaking, the reticle or photomask, hereinafter referred to collectivelyas reticle 102, includes a pattern in the object field. The pattern mayfor example be clear and opaque sections, gray scale sections, clearsections with different phase shifts, or a combination of the above.Light is propagated through the pattern, and the pattern is projectedthrough the lens system 100 and onto surface 110 of substrate 104. Thepattern projected from the reticle 102 onto substrate surface 110 may beuniformly reduced in size to various degrees such as 10:1, 5:1, 4:1 orothers. The optical system 100 may have a numerical aperture, NA, of0.75, but is not so limited. Systems having other numerical apertures,such as for example between about 0.60 to 0.90 or beyond this range areconceivable.

[0115] The arrangement of the plurality of lens elements L1-L29, isintended to be exemplary only and various other arrangements ofindividual lens elements having various shapes and sizes and comprisingdifferent materials may be used according to other exemplaryembodiments. The element thicknesses, spacings, radii of curvature,aspheric coefficients, and the like, are considered to be the lensprescription. This lens prescription is not limited and will vary withapplication, performance requirements, cost, and other designconsiderations.

[0116] The optical system 100 shown in FIG. 1, includes twenty-nineindividual lenses or powered refractive optical elements. Each of theseare preferably substantially optically transmisive at the wavelength ofoperation. More or less optical elements may be included in otherdesigns. In other embdiments, these elements may be powered orunpowered, refractive, reflective, or diffractive and may be coated oruncoated. The individual lens elements, L1-L29, are arranged along thecommon optical axis 106 that extends through the lens 100. In theexemplary embodiment of FIG. 1, this optical axis 106 is linear.

[0117] In the case where the optical system 100 comprises a plurality ofindividual lens elements L1-L29, or other optically transmissivecomponents, preferably one or more comprises cubic crystalline material.Cubic crystalline materials such as for example single crystal fluoridematerials like strontium fluoride, barium fluoride, lithium fluoride,and calcium fluoride may be used. Calcium fluoride is one preferredmaterial for operation with ultraviolet (UV) light. In an exemplaryembodiment, most or even all of the cubic crystalline optical elementsare formed of the same cubic crystalline material. This cubiccrystalline material may also have the same crystallographic orientationwith respect to the optical axis of the lens 100. In one preferredembodiment, a majority of the lens elements comprise cubic crystal suchas cubic crystal calcium fluoride having a <111> crystal axissubstantially aligned with the optical axis, as these crystals are lessexpensive than other crystallographic directions. In one embodiment, allof the lens or powered optical elements comprise <111> crystal.Non-powered transmissive optical elements, if any, may also comprise<111> crystal. The lens 100 may also include lens elements, which areformed of non-cubic crystalline material such as low-OH fused silica,also known as dry fused silica.

[0118]FIG. 2 is a schematic illustration showing the optical system 100functioning as the projection optics section within a larger lithographytool 50. FIG. 2 shows an optical source 112 and the substrate 104. Thereticle 102 is disposed between condenser optics 114 and projectionoptics 100. The optical field of reticle 102 may be of variousdimensions. Each of projection optics 100 and condenser optics 114 mayinclude an aperture stop and a plurality of lens elements, windows, andother refractive, reflective, catadioptric, and diffractive members. Thelithography tool 50 shown in FIG. 2 is aligned along the optical axis106, which in this case is linear. This lithography tool 50 may be awafer stepper, projection printer, or other photolithography ormicrolithography tool used in the semiconductor industry. Thelithography tool 50 may likewise be a scanning optical system, astep-and-repeat optical system or other microlithography or projectionoptics system. In a scanning-type optical system, a pattern on reticle102 is projected and scanned onto corresponding sections of surface 110of substrate 104. In a step-and-repeat optical system, such as aconventional wafer stepper, the pattern on reticle 102, is projectedonto multiple different portions of surface 110 in a plurality ofdiscrete operations. In either case, the reticle pattern includesvarious field points which are projected onto surface 110simultaneously.

[0119] The pattern printed on reticle 102 may be used to create acircuit pattern on surface 110 for an integrated circuit device beingfabricated on the substrate 104. The pattern may be projected onto aphotosensitive material formed on surface 110 to create an exposurepattern. The exposure pattern may be developed using conventional means,to produce a photo-pattern in the photosensitive material. Thephoto-pattern may be translated into the substrate 104 by etching orother method. A plurality of layers of materials can be depositedthereon. The surface 110 may be one of the layers and the photo-patternformed on the layer. Etching or other techniques may be used totranslate the photo-pattern into the layer. Similarly-formedphoto-patterns may be used to enable spatially selective doping usingknown methods such as ion implantation. In this manner, multiplephotolithographic operations, may be used to form various patterns invarious layers to create a completed semiconductor device such as anintegrated circuit. An advantage of the innovative techniques describedherein is that images formed on the substrate 104 have sufficiently lowaberration to enable precisely dimensioned and aligned device featuresto be created having reduced sizes.

[0120] In one exemplary scanning optical system, the optical field ofreticle 102 which is projected and scanned onto the substrate surface110 has a height of about 26 millimeters and a width of a fewmillimeters. Other field dimensions may be used which are suitable forthe specific applications and may depend on the type of lithography toolin which the projection optics are included. Similarly, the format atthe image plane where the wafer is located may vary as well.

[0121] The optical source 112 produces light that is subsequently shapedand conditioned by condenser lens 114. The optical wavelength of source112 may vary, and may be no greater than 248 nanometers in some cases.In one preferred embodiment, light having a wavelength of about 157nanometers may be used. The optical source 112 may produce linearlypolarized light. One optical source that produces linearly polarizedlight is an excimer laser. In other embodiments, the optical source 112may produce light having other polarizations or which is substantiallynon-polarized. A KrF excimer laser operating at about 248 nm, an ArFexcimer laser operating at about 193 nm, or an F₂ excimer laseroperating at about 157 nm, are examples of various optical sources 112.

[0122] The light produced by the optical source 112 is shaped andconditioned by the condenser lens 114 and propagated through the reticle102 and the projection optics 100 to project an image of the reticle 102or photomask onto the substrate 110. This light may be described as alight beam comprised of a plurality of rays. In accordance withconvention, the marginal ray is the ray from the point on the objectfield 102 intersecting the optical axis 106, to the edge of the aperture108 and also intersects the axis 106 at the image field 104. The chiefray is the ray from a given field point that passes through the centerof the aperture stop 108 and system pupils in the optical system 100.For an object field point located where the optical axis 110 intersectsthe reticle 102, the chief ray travels along the optical axis 106. Lightrays emanating from an individual object field point on the reticle orphotomask 102 correspond to a wavefront that is propagated through theprojection lens 100 and are focus down to a corresponding image fieldpoint at the substrate 104. The full image field is therefore generatedby a plurality image field points with corresponding wavefrontsassociated therewith.

[0123] As describe above, these wavefronts may be aberrated as a resultof retardance arising from intrinsic birefringence which has magnitudeand orientation that varies with direction in cubic crystallinematerials. FIG. 3A is a three-dimensional vector plot showing thespatial variation in birefringence axis orientation within a materialhaving a cubic crystalline lattice. The cubic crystalline lattice may bethat of calcium fluoride, for example. The crystal axis directions shownin FIG. 3A as well as in FIG. 3B are described using Miller indices.FIG. 3B is a three-dimensional plot corresponding to a quadrant of thevector plot shown in FIG. 3A, and depicts the corresponding magnitude ofthe intrinsic birefringence. It can be seen that the localized magnitudeand axis of the birefringence vary spatially throughout the crystal in aknown fashion. It can also be seen that, depending on the directionalong which light travels through such a cubic crystalline material, thebirefringence magnitude and the orientation of the birefringence axisrelative to the direction of propagation will vary. FIG. 3B representsan octant of the crystal lattice; the extension of this diagram to allpossible directions through the crystal gives twelve directions withmaximum birefringence, herein referred to as birefringence lobes.

[0124] The crystalline material can therefore be advantageously cutalong a given plane and arranged such that light normal to that planetravels along a chosen axis direction. For example, light travelingalong the [100] crystal axis 130 (i.e. along the [100] crystal latticedirection), which is oriented normal to the (100) crystal lattice plane132, sees a fixed and deterministic localized intrinsic birefringence.The birefringence magnitude and birefringence axis direction encounteredby a given ray therefore varies as a function of the direction alongwhich the light ray travels through the crystal.

[0125]FIG. 4 is a perspective view showing angular relationships betweenvarious directions through an exemplary cubic crystalline lattice. Thecubic crystalline lattice may be that of calcium fluoride, for example.FIG. 4 includes the peak intrinsic birefringence directions along the[101], [110], and [011] lattice directions, indicated by lines 142, 144,and 146, respectively. Line 140 represents the [111] crystal axisdirection, which corresponds to a direction through the crystal withoutintrinsic birefringence.

[0126]FIGS. 5A, 5B, and 5C are schematic representations of thevariations in birefringence magnitude and birefringence axis orientationin angular space for optical axis 106 orientations in the [110], [100],and [111] lattice directions, respectively, for the cubic crystallinelattice structure shown in FIG. 4. The center of the plot represents thebirefringence encountered by a ray traveling along the indicated crystalaxis and normal to the plane of the illustration. Birefringence depictedat increased radial distance from the center represents thebirefringence for rays at increased angles of propagation with respectto the optical axis 106. These plots, therefore can be used to visualizethe birefringence encountered from a plurality of rays emanating from apoint, e.g. on the optical axis 106 through a lens element comprisingfor example [111] material. The ray through the optical axis 106propagates in the [111] direction through the center of the lens elementand encounters a birefringence with magnitude and orientation specifiedat the center of the plot. A ray emanating from the point on the axisbut angled will experience birefringence specified by the directionindicated on these plots. In each of FIGS. 5A-5C, the localizedbirefringence axis is indicated by the direction of lines plotted on asquare grid, and the magnitude is indicated by the relative length ofthe lines.

[0127] The variation of birefringence magnitude in FIGS. 5A-5C ischaracterized by several lobes, also referred to as nodes, distributedazimuthally in which the birefringence is maximized. Each of FIGS. 5A-5Cshows peak intrinsic birefringence lobes with respect to the variouscrystal axis directions in the cubic crystalline lattice shown in FIG.4. The spatial orientation of the cubic crystalline lattice is indicatedby the other related crystalline lattice directions indicated by thearrows. For example, in FIG. 5A in which the center representsbirefringence encountered by a ray traveling along the [110] crystalaxis, a ray traveling along the [101] lattice direction is at a greaterangle with respect to the [110] crystal axis than a ray traveling alongthe [111] lattice direction; these ray angles are at 60° and 35.3°,respectively. This is indicated by the [101] arrowhead positioned at agreater radial distance from center than the [111] arrowhead. Therelative azimuthal directions of the indicated [100], [101], and [111]lattice directions are as shown in FIG. 4. This description applies toFIGS. 5B and 5C as well.

[0128] Referring to FIGS. 5A-5C, in each case, the indicated crystalaxis is the direction normal to the plane of the paper and at the centerof each of the respective figures. FIG. 5A shows intrinsic birefringencewith respect to the [110] lattice direction, including peak intrinsicbirefringence lobes 150A, 150B, 150C and 150D, each which forms an angleof 60° with respect to the [110] crystal axis direction. Intrinsic [110]birefringence also includes a central birefringence node. FIG. 5B showsintrinsic birefringence with respect to the [100] lattice direction,including peak birefringence lobes 152A, 152B, 152C and 152D each ofwhich forms a 45° angle with respect to the [100] crystal axisdirection. There are also peaks along the diagonals at 90° not depicted.FIG. 5C shows intrinsic birefringence along the [111] lattice directionand which includes peak birefringence lobes 154A, 154B, and 154C, eachof which forms an angle of 35.3° with respect to the [111] crystallattice direction.

[0129] The crystal lattice and resulting intrinsic birefringence lobeswith respect to the crystal axes such as shown in FIGS. 5A-5C,correspond to the exemplary case in which the cubic crystals arenegative cubic crystals; that is the ordinary refractive index isgreater than the extraordinary index, so the birefringence, n_(e)−n_(o),is negative. Calcium fluoride is an example of a negative cubic crystal.For positive cubic crystals, the patterns would be substantially similarexcept the lines would be each rotated by 90 degrees about theirmidpoints. It should be understood that other cubic crystalline opticalelements such as barium fluoride, lithium fluoride, and strontiumfluoride as well as other materials might be used to form opticalelements. With respect to any cubic crystalline material used, thevariations in the intrinsic birefringence direction and magnitude can bemeasured, or calculated using computer modeling. Furthermore, thevariations in intrinsic birefringence direction and magnitude of anoptical material may also be measured. Graphical representations of thevariations in birefringence magnitude and axis orientations similar tothose shown in FIGS. 5A-5C, can be similarly generated for each of theaforementioned cubic crystalline materials.

[0130] Referring again to FIG. 1, it can be understood that if each ofindividual lens elements L1-L29 or optical elements is formed of thesame cubic crystalline optical material such as calcium fluoride and theindividual elements L1-L29 are arranged along a common optical axis 106and aligned such that each of individual elements L1-L29 that isconstructed from a cubic crystalline material, includes substantiallythe same three dimensional lattice orientation with respect to theoptical axis 106, then the net retardance of the lens system 100 willhave a retardance that varies across the system exit pupil in a similarmanner to the angular intrinsic birefringence variation shownschematically in FIGS. 5A-5C.

EXAMPLE 1

[0131]FIG. 6 shows an exemplary optical system 160 usable forlithographic applications that is based on a Dyson catadioptric lenscomprising a single refractive element 162 and single reflective element164 aligned along an optical axis 165 [Refs. J. Dyson, “Unitmagnification optical system without Seidel aberrations,” J. Opt. Soc.Am., Vol. 49, p. 713 (1959), as described in R. Kingslake, Lens DesignFundamentals, Academic Press, Inc. (1978)] In one preferred embodiment,the refractive optical element comprises cubic crystalline material.This refractive element 162 has first planar surface 166 and secondcurved surface 168. The reflective element 164 also has a curvedreflective surface 170.

[0132] A notable feature of the Dyson design is that the object andimage fields 172, 174 are coplanar and located at the center ofcurvature, C, of the curved surfaces on the refractive and reflectiveelements 160 and 162. Preferably, the radius of curvature, R1, of therefractive element 162 is (n_(o)−1)/n_(o) times the radius of curvature,R₂ of the reflective surface 170, where n_(o) is the ordinary index ofrefraction of the refractive element 162. These design specificationsprovide a design that is corrected for Petzval curvature and third orderspherical aberration, coma, and sagittal astigmatism. Simulations wereperformed for an exemplary Dyson system having a numerical aperture of0.20 and object and image heights, H and H′ of 7 and −7 mm,respectively. The wavelength of light was assumed to 157.63 nm. Ofcourse other curvatures, thicknesses, materials, as well as other objectand image heights are possible. The optical system 160 may also be usedat other wavelengths may and may have a different numerical aperture inother embodiments. At this wavelength, however, the ordinary index ofrefraction, n_(o), is assumed to be 1.5587. The dimensions of theexemplary system 160 used in the simulations are listed in Table 1.TABLE 1 Surface Radius of Curvature Thickness Glass 1 Infinite 0.000 2−100.000 100.000 CaF₂ Stop −278.987 −178.987 Reflection 4 −100.000−100.000 CaF₂ Image Infinite 0.000

[0133] Cubic crystalline element 160 is assumed to have a birefringencemagnitude, n_(e)−n_(o), of −12×10⁻⁷ corresponding to the intrinsicbirefringence of calcium fluoride measured at a wavelength of 157 nm assuggested in D. Krahmer, “Intrinsic Birefringence in CaF₂,” at CalciumFluoride Birefringence Workshop, Intl SEMATECH, Jul. 31, 2001.

[0134] When the effects of intrinsic birefringence associated with thecubic crystalline lens material are taken into account, systemperformance degrades significantly. FIGS. 7A and 7B are graphicalillustrations showing the net retardance across the system exit pupilfor field points at the center and edge of the field, respectively, whenthe refractive element 162, shown in FIG. 6, is aligned with its [111]crystal axis parallel with the optical axis 165.

[0135] In these plots, and the retardance pupil maps to follow, theretardance is shown on a square grid across the system exit pupil forthe optical system of interest. As described above, the retardance willgenerally vary across a wavefront propagating through a birefringentoptical system. Accordingly, the retardance will be different fordifferent locations across a cross-section of the beam. The variationplotted in these retardance maps corresponds to the exit pupil of theoptical system.

[0136] The retardance plots are described in general by ellipses, whichsometimes degenerate into lines that show one of the eigen-polarizationstates. As defined above, the eigen-polarization state is a polarizationstate that remains unchanged for a ray propagating through the opticalsystem at given pupil coordinates. The eigen-polarization in the plotsis the slow eigenpolarization state. The fast and the sloweigenpolarizations are orthogonal. The fast eigenpolarization statecorresponds to the eigenpolarization shown in the plot rotated 90° aboutits center. For example, if the local retardance, be it linear orelliptical, is in the vertical direction, the slow eigenpolarizationstate will be oriented in the vertical direction and the fasteigenpolarization state will be oriented in the horizontally. Thedirection of the ellipse is defined by its major axis; for a verticalellipse, the major axis is oriented in the vertical direction. We referto the major axis as the retardance axis. The size of the ellipse orlength of the line at a given pupil coordinate is proportional to therelative strength of the retardance, i.e., the phase shift between thefast and slow eigenpolarizations.

[0137] Also, for the lenses and corresponding retardance maps, thecoordinates are defined using a right-handed coordinate system such thatthe system optical axis is in the +Z direction from the object towardsthe image plane, the +Y axis is in the vertical direction, and the +Xdirection is orthogonal to the Y and Z axes. For the exit pupilretardance and wavefront maps, the plots describe variations over anexit pupil reference sphere for a given field point using a Cartesiancoordinate system, where the X and Y coordinates are coordinates on thereference sphere projected onto a plane perpendicular to the chief ray.

[0138]FIGS. 7A and 7B include the effects of intrinsic birefringence onthe optical system 160 depicted in FIG. 6. The object field height inFIG. 7A is 0 mm and the object field height in FIG. 7B is 7 mm,corresponding to the center and edge field points, respectively. Thepeak retardance due to intrinsic birefringence in this example isapproximately 0.41 waves at a wavelength of 157.63 nanometers.

[0139]FIG. 7A plots the retardance across the exit pupil for a beam oflight represented by a bundle of rays emanating from an object point onthe optical axis 165 through the system 160 to a location on the imagefield 174 ideally also located on the optical axis 164. This beam andcorresponding bundle of rays fills the aperture and the exit pupil. Theretardance map of FIG. 7A corresponds to the retardance for rays at eachof the locations shown in the exit pupil. These retardance plots thusrepresent the retardance sampled across this particular beam at the exitpupil. The retardance may correspond to a wavefront at the exit pupilproduced by a point source on axis in the object field. Similarly, FIG.7B plots the retardance across the exit pupil for a beam of lightrepresented by a bundle of ray emanating from an off-axis object point,here 7 mm off axis, passing through the system 160 to a location on theimage field 174 also located off-axis. The beam and the correspondingbundle of rays also fills the aperture and the exit pupil. Theretardance map of FIG. 7B shows the retardance for rays at variouslocations in the exit pupil. As described above, this retardance maycorrespond to that of the wavefront at the exit pupil produced by apoint source at the off-axis field point, 7 mm off axis in the objectfield. This off-axis object field point may map, for example, into apoint on the edge of the format of a photolithography instrument. Theseretardance plots thus represent the retardance sampled across thisparticular beam at the exit pupil.

[0140]FIGS. 8A and 8B are graphical illustrations of the retardance ofanother exemplary embodiment of the lens system 160 shown in FIG. 6. InFIGS. 8A and 8B, the net retardance across the system exit pupil,including the effects of intrinsic birefringence, is depicted for fieldpoints at the center and edge of the field for a refractive element 162comprising cubic crystal having a [100] crystal axis along the opticalaxis 165. The peak retardance due to intrinsic birefringence in thisexample is approximately 0.1 waves at a wavelength of 157.63 nanometers.The peak retardance for the [100] optical element 162 associated withFIGS. 8A and 8B is thus smaller than the peak retrdance for the [111]optical element 162 associated with FIGS. 7A and 7B.

[0141]FIGS. 9A and 9B are graphical illustrations of the retardance ofanother exemplary embodiment of crystal lattice orientation of therefractive element 162 shown in FIG. 6. In FIGS. 9A and 9B, the netretardance across the system exit pupil is depicted for field points atthe center and edge of the field with refractive element 162 comprisingcubic crystal material having a [110] crystal axis generally along theoptical axis 165. The peak retardance due to intrinsic birefringence inthis exemplary arrangement is approximately 0.58 waves at a wavelengthof 157.63 nanometers, which is higher than the peak retrdance for the[111] optical element 162 associated with FIGS. 7A and 7B and the peakretrdance for the [100] optical element 162 associated with FIGS. 8A and8B. In the retardance pupil maps given in FIGS. 9A and 9B, and in othersto follow in which the net retardance exceeds a magnitude of +0.5 waves(i.e., π radian or 180°), the retardance is plotted “modulo 1 wave.” Itcan therefore be seen that the retardance orientation rotates by 90degrees at one-half-wave intervals, i.e., the effect of a 0.75 waveretarder at 0 degrees is the same as a 0.25 wave retarder at 90 degrees.

[0142] Each of three preceding examples, as illustrated in FIGS. 7A-9B,shows that the intrinsic birefringence produces large polarizationaberrations, namely, large retardance aberrations. The result is largewavefront aberrations, even with a single refractive element 162 used ata moderate numerical aperture. Without compensation, this aberrationstrongly exceeds the allowable wavefront error for photolithography ormany other imaging applications.

[0143] The retardance plots in FIGS. 7A-9B are for a single pass throughthe refractive optical element 162 corresponding to light propagatingfrom the object field 172 through the refractive optical element 162 andtoward the reflective optical element 164. As discussed above, the imageplane 174 is superimposed on the object plane 172 and thus, in a Dysonsystem, image formation involves reflection of light rays off thereflective optical element 164 and back through the refractive opticalelement 162. With refractive element 162 oriented with either its [111],[100], or [110] crystal axis aligned substantially along the opticalaxis 14, the retardance produced by refractive element 162 for thecentral field point will have the same variation in magnitude andorientation across the pupil on the first and second passes through therefractive element 162, since each ray from the central field point isreflected back upon itself by reflective element 164. The retardanceintroduced in the first pass is thus matched to the retardanceintroduced in the second pass.

[0144] To reduce the retardance produced by the refractive element 162,which comprises cubic crystal, a non-reciprocal Faraday rotator 180 isinserted between refractive element 162 and reflective element 164, asdepicted in FIG. 10. Preferably, this non-reciprocal rotator 180provides an approximately 45° rotation to the polarization of lightpassing therethrough. (By non-reciprocal is meant that the rotator 180rotates polarization in the same direction, i.e., clockwise orcounter-clockwise, for light transmitted through the rotator 180 in botha first forward axial direction and a second reverse axial direction.Thus, the rotator will provide a rotation in the second pass that addsto the rotation introduced on the first pass. A reciprocal rotator, incontrast, would rotate the polarization in the counter-opposingdirections for light passing through the rotator in the forward andreverse axial directions; the two polarization rotations would thereforecancel out with no net polarization rotation.)

[0145] The Faraday rotator 180 alters the polarization state by rotatingthe constituent polarizations by about 45° each time the beam passesthrough the rotator 180. For example, as is well known, linear orelliptical polarized light can be reduced to vertical and horizontalpolarization components. Both these polarization components are rotatedabout the propagation direction by approximately 45° upon respectivefirst and second forward and reverse passes through the Faraday rotator180. Because the beam travels through the 45° Faraday rotator 180 twicefollowing the first pass through refractive element 162, the rotator 180produces a net rotation of 90° for each constituent polarization statebefore the beam passes through refractive element 162 a second time.Accordingly, the above-mentioned horizontal component becomes verticallyoriented and the above-mentioned vertical component becomes horizontallydirected. The sum of the two components forms an aggregate polarizationcorresponding to the original linear or elliptical polarization staterotated by about 90° about the propagation direction.

[0146] Similarly, in the case where the light from the object has linearpolarization and is polarized along the horizontal, after first andsecond passes through the rotator 160, the horizontally polarized lightbecomes vertically polarized. For this example, in the first passhorizontally polarized light passes through the refractive opticalelement 160 and in the second pass, assuming no diattenuation,vertically polarized light having substantially the same magnitude asthe horizontally polarized light of the first pass is transmittedthrough the refractive optical element 162. In another example, lightfrom the object which is elliptically polarized with the major axis ofthe ellipse substantially aligned in the vertical direction, after firstand second passes through the rotator 160, becomes ellipticallypolarized light oriented horizontally. Thus, on the first pass throughthe refractive optical element 160, the elliptically polarized light isvertically oriented and upon the second reverse pass through therefractive element 162 is elliptically polarized with the major axisalong the horizontal. The constituent polarization components aresimilarly rotated by 90°.

[0147] Moreover, any arbitrary polarization that is transmitted throughthe optical element 162 can be reduced to a weighted complex sum offirst and second orthogonal eigenpolarization components. The firstpolarization component corresponding to the slow eigenpolarization stateis slowed with respect to the second orthogonal polarization componentcorresponding to the fast polarization state on a first pass. In thesecond pass, the first polarization component is rotated so as tocorrespond to the fast eigenpolarizaton state and the secondpolarization component is rotated so as to correspond to the sloweigenpolarization state. The second polarization component is thereforeslowed with respect to the first polarization component by an equalamount on the second pass. The retardance of first polarizationcomponent introduced on the first pass is offset or compensated for bythe retardance of the second polarization component on the second pass.The retardance is said to be matched or balanced.

[0148] Thus, for a beam propagating from the central field point, theretardance contributed by the refractive element 162 on the second passis equal in magnitude but opposite in sign, orthogonal in orientation,to the retardance contributed by the refractive element 162 on the firstpass at all pupil coordinates (i.e., for all ray angles), resulting insubstantial cancellation of the retardance produced by the intrinsicbirefringence. For the exemplary embodiments discussed above inconnection with FIGS. 7A-7B, 8A-8B, and 9A-9B wherein the refractiveelement 162 is oriented respectively with its [111], [100], or [110]crystal axis aligned substantially parallel to the optical axis 165, andwith a 45° polarization rotator 180 located between refractive element162 and the reflecting element 164, the RMS retardance over the pupil isessentially zero for the central field point. For off-axis field points,the retardance aberrations from the first and second passes through therefractive element 162 are also substantially balanced, although thereare small residual retardance aberrations, since the beam followsdifferent paths through the refractive element 162 on the first andsecond passes. In the computer simulations conducted for these examples,the Faraday rotator 180 is assumed to be an ideal rotator with zerothickness.

[0149] For exemplary embodiments having refractive elements 162 orientedwith its [111], [100], or [110] crystal axis aligned substantially inthe direction of the optical axis 165, and with a 45° non-reciprocalFaraday rotator 180 located so as rotate the polarization by about 90°in the first and second passes combined, the RMS retardance over thepupil is 0.0006, 0.0001, and 0.0035 waves, respectively at a wavelengthof 157.63 nm. The respective peak-to-valley retardance is 0.0032,0.0007, and 0.0130 waves respectively. Peak-to-valley retardance isreduced by approximately 128 times, 343 times, and 45 times,respectively by introducing the rotator 180 into this Dyson design.

[0150]FIG. 11A is a graphical illustration of net retardance magnitudeand orientation across the pupil for the extreme field point for theexemplary optical system 160 shown in FIG. 10 with refractive element162 having a [111] crystal axis aligned substantially along the opticalaxis 165. FIG. 11B is a graphical illustration of net retardancemagnitude and orientation across the pupil for the extreme field pointfor the exemplary optical system 160 shown in FIG. 10 with refractiveelement 162 oriented with its [110] crystal axis aligned substantiallyparallel to the optical axis 165. With a refractive element 162 having a[100] crystal axis substantially in the direction of the optical axis165, the retardance is very close to zero across the exit pupil, andthus, no retardance map has been provided.

[0151] Thus, by inserting a 45° Faraday rotator 180 between refractiveelement 162 and reflective element 164 in the exemplary system 160depicted in FIG. 10, each constituent polarization state is rotated byabout 90° between the first and second passes through refractive element162. Near perfect correction of the retardance aberrations for thecentral field point is provided. Substantial balancing of retardanceaberrations for off-axis field points, with the refractive element 162oriented with its [111], [100], or [110] crystal axis alignedsubstantially with the optical axis 165 is also attained.

[0152] Faraday rotators are well known in the art. These devices willrotate the polarization of light by a controllable amount. Otherpolarization rotators may also be employed. These rotators may be activedevices like the Faraday rotator which rely on application of a magneticfield to induce rotation of polarization states. Passive devices orcombination of active and passive devices are also possible.

[0153] An example of a 90° reciprocal wave plate rotator is constructedusing two quarter wave plates with their fast axes at 90° with respectto one another on either side of a half wave plate whose fast axis is at45° with respect to the fast axes of the quarter wave plates; see, e.g.,R. C. Jones, “A new calculus for the treatment of optical systems III:The Sohncke theory of optical activity,” J. Opt. Soc. Am., 31, p.500-503, 1941. These wave plates may be created using stress-inducedbirefringence (see, e.g., U.S. Pat. No. 6,084,708 issued to K. H.Schuster and U.S. Pat. No. 6,324,003 issued to G. Martin both of whichare incorporated herein by reference) or using uniaxial crystallinematerials. For a wave plate constructed by applying stress to a cubiccrystalline substrate, the stress birefringence coefficient is highestwhen the [100] crystal lattice direction is oriented along the systemoptical axis. The stress birefringence coefficient along the [100]direction is over 4 times larger than the coefficient along the [111]lattice direction [Alternative Materials Development (LITJ216) FinalReport—Stress Birefringence, Intrinsic Birefringence, and IndexProperties of 157 nm Refractive Materials, International SEMATECH, Feb.28, 2002, J. Burnett and R. Morton]. Thus, for a given plate thickness,the stress necessary to create a given retardance may be substantiallyreduced or minimized by orienting the wave plate with its [100] crystallattice direction along the optical axis, and cubic crystalline stresselements are often used with this orientation (see, e.g., U.S. Pat. No.6,201,634 issued to S. Sakuma which is incorporated herein byreference). Elements with weak retardance, other than the half waveplate, may also be placed between the quarter wave plates withoutsubstantially affecting the performance of the rotator. These type ofpolarization rotators will rotate any arbitrary polarization by 90°.

[0154] Other designs may be suitable in other cases. For example, if theincoming light has a known linear polarization, a quarter wave plate(QWP) can rotate polarization. On the first pass through the QWP,linearly polarized light may be converted into left circularly polarizedlight, if the QWP is at 45° to the polarization state. Reflection off amirror will transform the light into right handed circularly polarized.On the second pass through the QWP, the light is converted back intolinearly polarized light, with the polarization state rotated by 90°from that of the light initially incident on the QWP.

[0155] In other embodiments, the incoming and outgoing beams can befully separated at the polarization rotator. A reciprocal ornon-reciprocal 90° polarization rotator may be inserted in the path ofone of the beams, in lieu of the 45° non-reciprocal rotator in both ofthe beams. Reciprocal rotators include, but are not limited to, waveplate rotators and rotators constructed using an optically activematerial with its birefringence axis oriented along the direction of thesystem optical axis. The optical configuration to provide a 90°polarization rotation is not limited to those described above, but mayinclude other polarization rotators both well-known in the art and yetto be devised.

EXAMPLE 2

[0156] A mixing rod, also referred to as a homogenizer or kaleidoscope,is commonly used in illumination systems for photolithography. FIG. 12shows an exemplary mixing rod 200 comprising calcium fluoride and havingdimensions of 10×10×160 millimeters (mm). The mixing rod 200 is assumedto have a birefringence magnitude, n_(e)−n_(o), of −12×10⁻⁷corresponding to the intrinsic birefringence of calcium fluoridemeasured at a wavelength of 157 nanometers (nm) as suggested in D.Krahmer, “Intrinsic Birefringence in CaF₂,” at Calcium FluorideBirefringence Workshop, Intl. SEMATECH, Jul. 31, 2001. The mixing rod200 has proximal and distal ends 202, 204 and an input and output facesor ports 206, 208 for inputting and outputting the beam and walls 210 onopposite sides for reflecting the beam propagating therethrough. Anoptical axis 212 extends the length of the mixing rod 200. The mixingrod 200 can be separated into two portions 214, 216, preferably of equallength, and more preferably having substantially the same retardance,i.e., the magnitude of retardance and the orientation of the retardanceaxis across the exit pupil is equivalent for both sections 214, 216. Thetwo sections 214, 216, come together at the axial center 218 of themixing rod 200.

[0157] A beam is input into the rod 200 by focusing it at the center ofthe input port 206 of the mixing rod 200 along the optical axis 212. Thebeam may have, for example, a numerical aperture of about 0.5. The beampropagates from the input port 206 to the output port 208, raysreflecting from the sidewalls 210 within the mixing rod 200. Rays 220and 222 illustrate how light travels down the length of the rod 200.

[0158]FIG. 13 shows the net retardance across the exit pupil for amixing rod 200 comprising calcium fluoride having a [111] crystal axisin the direction of the optical axis 212 of the mixing rod 200, assumingthat the reflections from the walls 210 of the integrating rod 200 donot alter the polarization state of the light propagating therethrough.In these plots, the retardance orientation rotates by 90 degrees atone-half-wave (π or 180°) intervals, i.e., the effect of a 0.75 waveretarder at 0 degrees is the same as a 0.25 wave retarder at 90 degrees.Thus, the peak retardance due to intrinsic birefringence in this exampleis approximately 0.8 waves at a wavelength of 157 nanometers.

[0159] As discussed above, cubic crystal wherein the [111] crystal axisis aligned with the optical axis 212 of the optical element, here amixing rod 200, is preferred. Cubic crystalline optical elements havingan optical axis along the [111] direction are easiest to grow with thelow stress birefringence levels that are required for lithographicquality optics, as the stress birefringence coefficient is minimizedalong the [111] axis (see, e.g., U.S. Pat. No. 6,201,634 issued to S.Sakuma). While the [111] orientation is preferred, the reduction ofretardance aberrations can achieved using the techniques describedherein for other crystal orientations as well.

[0160]FIG. 14 shows the polarization state across the exit pupil when auniformly circularly polarized beam is incident on the entrance face ofthe mixing rod 200. The output polarization state is not uniformlypolarized as a result of retardance. Uniform polarization, however, isdesirable for illumination of the reticle in photolithographyapplications, and without compensation, this mixing rod 200 will produceunacceptable reticle dependent distortion and linewidth variations.

[0161] In FIG. 14, and the polarization state pupil maps to follow, thepolarization state of the beam is shown on a square grid across thesystem exit pupil for the optical system of interest and is described ingeneral by ellipses which sometimes degenerate into lines. The shape andorientation of the ellipse or line at a given pupil coordinate depictthe state and orientation of the output polarization state at the exitpupil.

[0162]FIG. 15 is a schematic side view of the mixing rod 200 furthercomprising polarization rotation optics 230 disposed at the axial center218 of the mixing rod 200. Preferably, the polarization rotation optics230 is a 90° rotator that rotates the polarization by about 90°. Thepolarization transforming optics 230 may be a reciprocal ornon-reciprocal rotator. This rotator 230 is preferably positioned withinthe mixing rod 200 at the location 218 between the two sections 214,216, which each preferably introduce equivalent retardance, i.e., bothin magnitude and orientation. The rotator 230 is thus inserted betweensections 214, 216 having matched birefringence and retardanceproperties.

[0163] In one exemplary embodiment, a stress birefringence wave platerotator is employed, although other types of polarization rotationoptics may also be used. As discussed above, a wave plate rotator may beconstructed using two quarter wave plates with their fast axes at 90°with respect to one another on either side of a half wave plate whosefast axis is at 45° with respect to the fast axes of the quarter waveplates; see, e.g., U.S. Pat. No. 6,084,708 issued to K. H. Schuster andU.S. Pat. No. 6,324,003 issued to G. Martin, both of which areincorporated herein by reference in their entirety. In one embodiment,the half-wave plate comprises a 2 millimeter thick [100] calciumfluoride element and the quarter waveplates each comprise a 1 millimeterthick [100] calcium fluoride elements. The [100] orientation isadvantageous because of the higher amount of birefringence in comparisonwith other orientatons like the [111] and [110].

[0164] On-axis, the 90° rotator 230 produces a rotation of eachconstituent input polarization state of approximately 90° or π/4radians. The eigenpolarization states of a rotator are circularlypolarized and the 90° rotator exhibits 90° of phase delay between thetwo orthogonally polarized circular states, or a quarter-wave ofcircular retardance. For off-axis rays, the retardance of the waveplates deviates from their on-axis values due to the variation ofrefractive index with angle as well as the change in the optical paththrough the waveplates. Thus, the rotator 230 will deviate from aquarter wave of circular retardance for off-axis rays. FIG. 16 shows themagnitude of the retardance error as a function of angle of incidence inair for 1 and 3 millimeter thick quarter wave plates (curves 232 and 234respectively) for a wavelength of 157 nm. The index differences betweenthe two orthogonal polarization states are 3.9×10⁻⁵ and 1.3×10⁻⁵ forcurves 232 and 234, respectively, as indicated in the legend. Over a 30°angle of incidence range in air, the retardance error is withinapproximately 0.03 waves, which is acceptable for many illuminationapplications.

[0165] The polarization rotation optics 230 allows the retardance to bereduced for all polarization states, i.e., for any arbitrarypolarization or for unpolarized light, both which comprise a weightedsum of orthogonal polarization states. For example, the polarizationstate of light entering the mixing rod 200 at the input 202 can beseparated into the orthogonal eigenpolarization states associated witheach of the first and second sections, 214, 216. Since the two sectionsare substantially identical, the eigenpolarizations of the two sections214, 216 are the same. This characteristic can be exploited tocompensate or offset the retardance introduced by each of the sections214, 216.

[0166] In particular, light input into the mixing rod 200 will havefirst and second orthogonal polarization components corresponding to theslow and fast eigenpolarizations of the first section 214 of the mixingrod 200, respectively. The first polarization component will thus beretarded with respect to the second polarization component by an amountcorresponding to the retardance introduced by the first section 214 ofthe mixing rod 200. This light will pass through the polarizationrotation optics 230, which will rotate the polarization components 90°such that the first polarization component will correspond to the fasteigenpolarization of the second section 216 and the second polarizationwill correspond to the slow eigenpolarization of the second section 214.The second polarization component will thus be retarded with respect tothe first polarization component by an amount corresponding to theretardance introduced by the second section 216 of the mixing rod 200.Since the birefringence of the first and second sections 214 and 216 aresubstantially the same, the birefringent and retardance properties ofthe two sections 214 and 216 being matched, the retardance encounteredby the first and second components upon passing through the first andsecond sections 214, 216 will be offset. The first component is retardedby an equal amount in the first section as the second component isretarded in the second section. The retardance contributed by the firsthalf 214 of the mixing rod 200 being substantially equal in magnitudebut nearly orthogonal in orientation to the retardance contributed bythe second half 216 of the mixing rod 200 at all pupil coordinates(i.e., for all ray angles), results in substantial cancellation of theretardance produced by the intrinsic birefringence.

[0167]FIG. 17 shows the net retardance across the exit pupil of theexemplary embodiment shown in FIG. 15. The peak retardance due tointrinsic birefringence in this example is less than 0.044 wavespeak-to-valley at a wavelength of 157 nanometers, which is substantiallyreduced from the peak-to-valley retardance of 0.8 waves before therotator was added.

[0168]FIG. 18 shows the polarization state across the exit pupil when auniformly circularly polarized beam is incident on the entrance face 206of the mixing rod 200 shown in FIG. 15 which includes the polarizationrotation optics 230. The output polarization state is substantially moreuniform, i.e., circularly polarized, than the output polarization forthe mixing rod 200 without the rotator 230 depicted in FIG. 12, and isthus more suitable for photolithography.

EXAMPLE 3

[0169] These techniques for reducing polarization aberrations caused byintrinsic birefringence are particularly well suited for providingwavefront correction of refractive imaging systems used forphotolithography. In addition to the rigorous performance requirementsassociated with this application, photolithography lenses often includea large number of refractive optical elements, which together possess asignificant amount of birefringence. Wavefront error caused byretardation aberrations can therefore substantially limit the resultantresolution obtained by the photolithographic projection system. Anexemplary projection lens 100, one which contains all opticallytransmissive and, in particular, all refractive, powered, opticalelements L1-L29 is illustrated in FIG. 1. A similar lens is provided inEuropean Patent Application No. 0 828 172 by S. Kudo and Y. Suenaga, thecontents of which are herein incorporated by reference. This opticalsystem 100 is designed to operate at a central wavelength of 193.3nanometers, provides a 4×reduction at a numerical aperture of 0.60, andhas an image field diameter of 30.6 millimeters (mm). The exemplarydesign employs twenty-nine (29) optical elements L1-L29 comprisingcalcium fluoride and fused silica and uses only spherical surfaces.Retardation aberrations, however, are calculated below for a similarlens having the same prescription as disclosed in European PatentApplication No. 0 828 172 but with all the lens comprising cubiccrystalline material, namely calcium fluoride. Accordingly, eachcomponent L1-L29 is assumed to have an intrinsic birefringence of−12×10⁻⁷ in these baseline computations. The actual value of intrinsicbirefringence may vary depending on the material or in the case wherethe material is crystal, the crystal orientation. Also, in otherembodiments, one or more of the optical elements L1-L29 may comprisecrystalline material other than cubic crystals as well asnon-crystalline materials. Fused silica is an example of such anon-crystalline material that is substantially optically transmissive toUV wavelengths such as 248 nm and 193.3 nm and is therefore compatiblewith such UV applications. As discussed above, the exemplary system 100includes an optical axis 106, the twenty-nine (29) optical elementsL1-L29 being aligned along this optical axis 106 as is customary for onaxis optical systems. An optical beam propagates along the optical axis106, from the object plane 106 to the image plane 104 through the lenselements L1-L29 in the lens 100.

[0170] The RMS and maximum retardance and diattenuation over the exitpupil are listed in Table 2 below for the nominal design withoutintrinsic birefringence effects included for relative field heights of0, 0.7, and 1.0. As described above, diattenuation, another form ofpolarization aberration, is a measure of the maximum difference intransmission between orthogonal polarization states. The relative fieldheight is defined to be the actual field height normalized by thesemi-field height. Thus, an image located on the optical axis 106 haszero field height and an image located at 15.30 mm in this lens 100corresponds to unit relative field height. The retardance anddiattenuation result from the single-layer anti-reflection coatings usedin the model. The retardance is radially oriented and is largest inmagnitude at the edge of the pupil. The retardance due only to theanti-reflective coating is relatively small. TABLE 2 Retardance RelativeField (waves at λ_(o) = 193.3 nm) Diattenuation Height RMS Maximum RMSMaximum 0.0 0.0021 0.0077 0.0019 0.0076 0.7 0.0024 0.0086 0.0023 0.00911.0 0.0028 0.0111 0.0031 0.0127

[0171] When the effects of intrinsic birefringence associated with thecubic crystalline lens material are taken into account, systemperformance degrades significantly. FIGS. 19A and 19B are graphicalillustrations showing the net retardance across the system exit pupilfor field points at the center and edge of the field, respectively,according to an exemplary embodiment in which all lens elements L1-L29,shown in FIG. 1, are identically aligned in three dimensions, with theelements having their [110] crystal axis direction along the opticalaxis 106. FIGS. 19A and 19B include the effects of intrinsicbirefringence. FIG. 19A shows the net retardance at various positionsacross the exit pupil for a beam of light originating from a point inthe object field location in FIG. 19A which is 0 mm away from theoptical axis 106. FIG. 19B quantifies the net retardance at variouslocations across the exit pupil for a beam of light originating from apoint in the object field at a height is 61.2 mm away from the opticalaxis 106. These two points correspond to the center and edge fieldpoints, respectively. This edge field point may, for example, map into apoint at the edge of the frame of a photolithography instrument forprocessing semiconductor wafers. In the retardance pupil maps given inFIGS. 19A and 19B, and in others to follow in which the net retardanceexceeds a magnitude of 0.5 waves, the retardance is plotted “modulo 1wave.” It can therefore be seen that the retardance orientation rotatesby 90 degrees at one-half-wave (π radians or 180°) intervals, i.e., theeffect of a 0.75 wave retarder at 0 degrees is the same as a 0.25 waveretarder at 90 degrees. Thus, the peak retardance due to intrinsicbirefringence in this exemplary arrangement is approximately 0.72 wavesat a wavelength of 193.3 nanometers on axis and 0.87 waves at theextreme field.

[0172]FIGS. 20A and 20B are graphical illustrations of the retardancefor another exemplary embodiment of crystal lattice orientation of thelens system 100 shown in FIG. 1. In FIGS. 20A and 20B, the netretardance across the system exit pupil, including the effects ofintrinsic birefringence, is depicted for field points at the center andedge of the field 102 with the crystal axes of all the elements L1-L29substantially identically aligned, with the [100] crystal axes generallydirected parallel to the optical axis 100. The peak retardance due tointrinsic birefringence in this example is approximately 0.49 waves at awavelength of 193.3 nanometers on-axis and 0.54 waves at the extremefield.

[0173]FIGS. 21A and 21B are graphical illustrations of the retardance ofyet another exemplary embodiment of crystal lattice orientation of thelens system 100 shown in FIG. 1. In FIGS. 21A and 21B, the netretardance across the system exit pupil is depicted for field points atthe center and edge of the field 102 with the crystal axes of allelements L1-L2 substantially identically aligned, for [111] opticalelements, i.e., elements comprising [111] crystal with the [111]direction parallel to the optical axis 106. Again, the retardanceorientation rotates by 90 degrees at one-half-wave (π radians or 180°)intervals; thus, the peak retardance due to intrinsic birefringence isapproximately 1.37 waves at a wavelength of 193.3 nanometers, and 1.40waves at the extreme field.

[0174] In these three preceding examples, as illustrated in FIGS.19A-21B, the intrinsic birefringence produces large retardanceaberrations and consequently large wavefront aberrations, when each ofthe elements L1-L29 are oriented identically with respect to the opticalaxis 106. Without compensation, this wavefront aberration stronglyexceeds the allowable wavefront error for high precisionphotolithography.

[0175] To reduce this aberration, two polarization rotators are added tothe optical system 100 to compensate the retardance produced by theintrinsic birefringence of the optical elements L1-L29. See FIG. 22,which shows a similar lens 300 as presented in FIG. 1, but with twopolarization rotators 310 and 320 which rotate the polarization of abeam of light passing therethrough by −90° and 90° respectively. Thislens 300 has an optical axis 302, which defines an optical path for abeam of light to propagate from an object plane 306 to an image plane308. The optical path follows a straight line in FIG. 22, however, inother embodiments, the optical path and the optical axis 302 may beother than straight and linear. The lens 300 comprises twenty-ninepowered refractive optical elements L1-L29 that transmit and control thepropagation of light from the object 306 to the image field 308.

[0176] In FIG. 22, the −90° rotator 320, which is optional, is locatedbetween the object plane 306 and the first element L1. The 90° rotator310 is positioned at the location that minimizes the net systemretardance without additional changes to the operation of the system300. This position is preferably determined such that the birefringenceof the optical element(s) L1-L26 in the portion of the optical pathpreceding the rotator 310 is equivalent to the birefringence of theoptical element(s) L27-L29 in the optical path following the rotator310. Similarly, the net retardance introduced by the optical elementsL1-L26, L27-L29 in the path before and after the rotator 310 are matchedand balance. Both the magnitude of the retardance and the orientation orthe retardance axis substantially the same. Expressed yet another way,the eigenpolarizations states corresponding to the optical element orelements L1-L26 through which light passes prior to reaching the rotator310 are preferably substantially identical to the eigenpolarizationstates corresponding to the optical element or elements, L27-L29 throughwhich light passes after the rotator 310.

[0177] In calculating the improved performance of the lens 300, therotators 310 and 320 are assumed to be ideal polarization rotators, suchthat each constituent polarization state is rotated by exactly 90 or−90°. Additionally, these rotators 310 and 320 are assumed to have zerothickness. The lens prescription may be adjusted and optimized forfinite thickness rotators 310 and 320 as well. The optical axis 302 isdefined along the Z direction, the field is oriented in the Y direction,and a right handed coordinate system is used; thus, a 90° rotation aboutthe optical axis 302 represents a rotation of the X axis towards the Yaxis. The order of the rotators 310, 320 may be switched withoutchanging the performance, such that a 90° rotator 310 is used in objectspace, and a −90° rotator 320 is used between elements L26 and L27.Also, the rotator 320 in object space may, in principle, bealternatively used in image space (between the last element L29 and theimage plane 308). However, for this particular design, as well as manyphotolithography lenses, the performance of a real rotator may be betterif it is located in object space, since the range of incident angles islower. Having some rays incident on the rotator 310, especially onecomprising waveplates, at a high angles causes variations in the phasedelay and thus not all rays experience the same polarization rotation.Preferably, the rotator 310 is positioned where the rays propagatethrough the optical system 300 are more closely parallel to the opticalaxis 302 and not substantially angled with respect thereto. Preferably,the polarization is rotated substantially uniformly across the beam oflight that passes through the rotator 310. For rays substantially alongor parallel to the optical axis, the retardance and phase shift is thesame. Thus, at least rays having small angle with respect to the opticalaxis 302, will undergo substantially that same amount of polarizationrotation.

[0178] Substantial benefit is obtained by inserting the 90° polarizationrotator 310 between front and rear parts 322 and 324 of the lens 300. Asdiscussed above, the location of the rotator 310 is chosen such that thenet retardance produced by the cubic crystalline elements in the frontpart 322 of the system 300 are similar in magnitude as a function offield and pupil position to the net retardance produced by the cubiccrystalline elements in the rear part 324 of the system 300. The rotator310 allows the retardance contributions of the individual elementsL1-L29 to be balanced to provide wavefront correction and reduce the netretardance produced by the intrinsic birefringence to an acceptablelevel. Under these conditions, the system 300 will have a uniformcircular retardance of 90 degrees. The 90 degrees of circular retardancewill rotate an arbitrary polarization state by 90 degrees. The lightinput into the optical system 300 will experience minimal wavefrontaberrations, although the polarization state will be rotated by 90degrees between the object and image planes 306 and 308, because of the90° of circular retardance.

[0179] In order to evaluate the magnitude of the deviation of theretardance from 90 degrees, the −90 degree rotator 320, is insertedbetween the object 306 and first lens element L1. This second rotator320 is used in this example as a computational aid and may or may not beincluded in the optical system 300. This second rotator 320 may beincluded in optical systems 300, for example, if the input and outputpolarizations need to be identical. Insertion of the second rotator 320into the lens model also facilitates optimization of the system 300 byallowing the designer to simply optimize the retardance aberrationsusing a merit function that only contains the magnitude of theretardance. In this case, the designer just needs to reduce themagnitude of the retardance to zero. Without the second rotator, thedesigner would need to optimize on the magnitude and shape of theretardance to be constant across the pupil. This merit function wouldhave twice as many terms and would take longer to optimize. Anadditional rotator 320, however, may introduce additional complexity andcost into the optical system 300 and thus may be excluded.

[0180] All the optical elements L1-L29 in the optical system 300depicted in FIG. 22 comprise cubic crystalline material oriented withidentical three-dimensional crystal lattice directions and with the[100] crystal lattice direction for each element L1-L29 along the systemoptical axis 302. Additionally, each of these optical elements comprisecurved surfaces and are powered refractive optical elements. Operationis at a wavelength, 193.3 nanometers, where each optical element L1-L29is substantially optically transmissive.

[0181]FIGS. 23A and 23B are graphical representations that depict theretardance across the system exit pupil for optical elements L1-L26 inthe front portion 322 of the system 300, between the −90° and 90°rotators 310 and 320. The retardance is caused by the intrinsicbirefringence and anti-reflection coatings. As previously shown in Table2, the contribution due the coatings is relatively small; thus, the bulkof the retardance aberration is due to the intrinsic birefringence. FIG.23A shows net retardance at the center field point and FIG. 23B showsnet retardance at the edge field point.

[0182]FIGS. 24A and 24B are graphical representations that depict theretardance across the system exit pupil for optical elements L27-29 inthe rear portion 324 of the system 300, between the 90° rotator 310 andthe image plane 308. FIG. 24A shows net retardance for the center fieldpoint and FIG. 24B shows net retardance for the edge field point.

[0183] Comparing FIGS. 23A and 24A, the net retardance from the frontportion 322 of the system 300 is substantially similar to the netretardance from the rear portion 324 of the system 300 across the pupilfor the beam emanating from the axial field point. Thus, because the 90°rotator 320 rotates each constituent polarization state by 90°, theretardance of the rear portion 324 of the system 300 will compensate theretardance of the front portion 322 of the system 300. The sloweigenpolarization states of the two portions 322 and 324, which areshown in FIGS. 23A and 24A, respectively, are linear across the exitpupil. Thus, in this case, light propagating through the first portion322 having a first polarization component parallel to the sloweigenpolarization state of the first portion 322 is retarded withrespect to a second orthogonal polarization component that is parallelto the fast eigenpolarization state. The phase of the first polarizationis retarded with respect to that of the second polarization by an amountcorresponding to the retardance introduced by the first portion 322. Thepolarization rotator 320, however, rotates the polarization of the firstand second polarization components such that the first polarizationcomponent is parallel to the fast eigenpolarization state in the secondportion 324 and the second polarization state is parallel to the sloweigenpolarization state. The second polarization component is thereforeretarded with respect to the first polarization component in the secondportion 324 by an amount equal to the retardance introduced to the firstpolarization in the first portion 322. The retardances thus cancel.

[0184]FIGS. 23B and 24B show that the net retardance across the pupilfor the front and rear portions 322 and 324 of the optical system 300are not as well matched at the extreme field. The retardancecontribution of the front portion 322 is larger in magnitude and is notcentered in the pupil.

[0185]FIGS. 25A and 25B are graphical representations that depict thenet retardance across the system exit pupil due to intrinsicbirefringence of all elements L1-L29, including the 90° rotator 310, butexcluding the −90° rotator 320. These plots show that the rotator 310contributes a roughly constant retardance across the pupil that can bebalanced with the retardance produced by a second rotator 320. Ingeneral, to reduce aberration, an optical system preferably has novariation in the polarization state across the pupil. This occurs whenthe retardance is constant or degenerately when there is no retardance.In the degenerate case, any polarization state is an eigenpolarizationstate.

[0186]FIGS. 26A and 26B are graphical representations that depict thenet retardance across the system exit pupil due to intrinsicbirefringence of all elements L1-L29, including the 90° and −90°rotators 310 and 320. The retardance introduced by the 90° rotator 320is offset by the retardance introduced by the −90° rotator 320 forfurther correction. As shown, the net retardance for the axial field hasbeen significantly reduced compared with the retardance for all the[100] elements L1-L29 without rotators 310, 320 shown in FIG. 20A. FIG.26B, however, shows larger residual retardance across the pupil.

[0187] The RMS and maximum retardance over the exit pupil are listed inTable 3 below for relative field heights of 0, 0.7, and 1.0. Theseinclude the effects of intrinsic birefringence and the single layeranti-reflection coatings used in the model. A relative field height of0.0 corresponds to the center field point is associated with theretardance results shown graphically in FIG. 26A, and a relative fieldheight of 1.0 corresponds to the edge field point, retardance results ofwhich are shown graphically in FIG. 26B. The RMS retardance ranges from0.0154 to 0.0677 waves at λ₀=193.3 nm. TABLE 3 Retardance (waves atλ_(o) = 193.3 nm) Relative Field Height RMS Maximum 0.0 0.0154 0.06060.7 0.0528 0.2486 1.0 0.0677 0.3826

[0188] Further correction may be achieved by applying stress to one ormore elements to produce stress induced birefringence. For example, aclamp, brace, or other structure around a perimeter of an opticalcomponent can be employed to apply, e.g., tensile or compressive forcesto the optical component. In the one embodiment depicted in FIG. 27, atensile hoop stress was applied to the first element L1 of the opticalsystem 300 depicted in FIG. 22. For purposes of calculations, thetensile hoop stress is assumed to produce a radial variation inbirefringence with a peak birefringence magnitude of −6.95nanometers/centimeter at the clear aperture diameter. FIG. 28A shows acontour plot of the assumed birefringence profile. FIGS. 28B and 28C aregraphical representations that depict the retardance across the systemexit pupil due to stress induced intrinsic birefringence andanti-reflection coatings associated with the first lens element L1.Table 4 lists the corresponding RMS and maximum retardance values as afunction of relative field height. This data shows that there is arelatively small contribution on axis 302, with a peak retardance of0.025 waves at λ=193.3 nm, while the retardance at the extreme field ismuch larger, with a maximum retardance of 0.31 waves.

[0189] The first element L1 in this design is particularly well suitedfor application of hoop stress to introduce birefringence. The firstelement L1 can provide a large variation in retardance with field sinceit is close to the object plane 306 thereby resulting in variation indisplacement of the beam across the surface of the first element L1 withdifferent field heights. Also, this element L1 in this example isparticularly thick, which provides good mechanical stability forapplying stress to the element. TABLE 4 Retardance (waves at λ_(o) =193.3 nm) Relative Field Height RMS Maximum 0.0 0.0070 0.0252 0.7 0.03830.1856 1.0 0.0505 0.3134

[0190] Comparing FIGS. 28B and 28C with the residual retardance mapsgiven in FIGS. 26A and 26B, the retardance produced by the stressinduced birefringence is substantially similar to the residual systemretardance as a function of pupil and field position. Because a 90°rotator 310 is used following the element L1 with stress inducedbirefringence, the retardance contribution of the stressed element L1balances the net retardance of the system 300 resulting from intrinsicbirefringence.

[0191]FIGS. 29A and 29B are graphical representations that depict thenet retardance across the system exit pupil due to intrinsicbirefringence of all elements L1-L29, including the 90° and −90°rotators 310 and 320 and the stress induced birefringence on the firstelement L1. Corresponding values for RMS and maximum retardance arelisted in Table 5. As shown, the retardance produced by the stressedelement L1 further improves the retardance correction. TABLE 5Retardance (waves at λ_(o) = 193.3 nm) Relative Field Height RMS Maximum0.0 0.0127 0.0517 0.7 0.0146 0.0722 1.0 0.0161 0.0811

[0192] The retardance using all [100] elements without rotators 310 and320 is shown in FIGS. 20A and 20B. With the two rotators 310 and 320 andthe stressed first element L1, the maximum retardance was reduced from0.488 waves to 0.0517 waves at λ=193.3 nm for the axial field(9.4×reduction) and a reduction in maximum retardance from 0.544 wavesto 0.0811 waves at the extreme field (6.7×reduction).

[0193] In this example, the application of hoop stress to an opticalelement L1 was assumed to produce a quadratic variation in the magnitudeof the birefringence, with the birefringence axis oriented radially. InFIG. 30, the retardance as a function of element radius calculated usingfinite element analysis methods is shown for a meniscus shaped calciumfluoride element with 5 mm center thickness, radii of curvature of 40and 35 mm, and a compressive stress of 1000 pounds per square inch. Thefracture strength of a well-polished single crystal of calcium fluoridehas been reported to be in excess of 20,000 pounds per square inch.Although this first lens element L1 differs from the meniscus shapedelement, the variation in stress is expected to follow a similarfunctional form. In alternative embodiments, tensile stress, may beemployed to create stress-induced birefringence.

[0194] As is commonly known in the art and shown in FIG. 31A, a realpolarization rotator 350 for rotating polarization direction may beconstructed using two quarter wave plates 354 and 356 and a half waveplate 358 aligned along a common optical axis 352. The two quarter waveplates 354 and 356 have fast axes 360 and 362 rotated about the opticaxis 352 by 90° with respect to one another. The half wave plate 358 isinserted between the two quarter wave plates 354 and 356 and has a fastaxis 364 at an angle of about 45° with respect to the fast axes 360 and362 of the quarter wave plates 354 and 356. This rotator 350 willconvert any arbitrary polarization state into a new polarization statecorresponding to the old state with the polarization orientation rotatedby 90°. Such a polarization rotator is describe in see, e.g., U.S. Pat.No. 6,084,708 issued to K. H. Schuster and U.S. Pat. No. 6,324,003issued to G. Martin, both of which are incorporated herein by referencein their entirety.

[0195] Elements (not shown) with weak retardance, other than the halfwave plate 356, may also be placed between the quarter wave plates 354and 356 without substantially affecting the performance of the rotator350. These additional elements may, for example, include powered opticalelements. These wave plates 354, 356, and 358 may be created usingstress induced birefringence or using uniaxial materials. For awaveplate constructed by applying stress to a cubic crystallinesubstrate, the stress birefringence coefficient is highest when the[100] crystal lattice direction is oriented along the system opticalaxis 352. The stress birefringence coefficient along the [100] directionis over 4 times larger than the coefficient along the [111] latticedirection. Thus, for a given plate thickness, the stress necessary tocreate a given retardance may be minimized by orienting the wave platewith its [100] crystal lattice direction along the optical axis 352, andcubic crystalline stress elements are often used with this orientation.See for example, U.S. Pat. No. 6,201,634 issued to S. Sakuma, et al.,and U.S. Pat. No. 6,324,003 issued to G. Martin, which are incorporatedherein by reference.

[0196] A real quarter wave plate has a residual retardance error thatdepends on numerical aperture and birefringence magnitude. In FIG. 31B,the estimated residual retardance error is plotted over a numericalaperture range of 0.0 to 0.5 and a range of intrinsic birefringence from1×10⁻⁶ to 1×10⁻⁴. Over these ranges, the residual retardance error isless than ⅛^(th) wave; these results suggest that the performance forreal rotators constructed from wave plates should be acceptable forcompensation in many applications such as for lithography lenses.

[0197] Other types of polarization rotators 350 different than thatshown in FIG. 31A may alternatively be employed. These include, but arenot limited to, Faraday rotators and rotators constructed using anoptically active material such as crystal quartz or sugar water. Whenmaking a quartz rotator, the material is cut so that the birefringenceaxis is parallel to the optical axis, whereas the birefringence axis isperpendicular to the optical axis in quartz linear retarders.

[0198] In addition, although the polarization rotator 350 shown in FIG.31A rotates the polarization by 90 degrees, compensation and reductionin polarization aberrations can be provided if odd integer multiples of90 degrees (i.e., ±90, ±270, etc.) are provided as well. For example, apolarization rotator that rotates an arbitrary polarization by ±270about the direction of propagation may be situated between two portions322, 324 of the optical system 300 having equivalent birefringence.

[0199] Also, although 90° of rotation is introduced at one locationalong the axis 302 of the optical system 300, the optical system 300 isnot so limited. In other designs, an odd number of 90° of rotators maybe used. For example, three polarization rotators each rotating thepolarization by 90° may be inserted in three locations within theoptical system 300. Preferably, these three 90° polarization rotatorswould separate the optical system into four portions. The locationswould preferably be selected such that the birefringence from each ofthe four portions would substantially cancel out. In other designs, thepolarization can be rotated by amounts other than 90°. Specifically, ifthere is an odd number of rotators, n, the rotation of each rotator canbe 180°/(n+1). For example, three polarization rotators each rotatingthe polarization by 45° may be inserted in three locations within theoptical system 300. Preferably, these three 45° polarization rotatorswould separate the optical system into four portions. The locationswould preferably be selected such that the birefringence from each ofthe four portions would substantially cancel out. There are manypossible ways to use rotators to cancel the intrinsic birefringence andthese examples are merely illustrative and not restrictive. It isexpected that the single rotator solution will usually be the very costeffective, because it is the simple.

[0200] Also, although non-powered waveplates 354, 356, and 358, areshown as forming the polarization rotator 350, the waveplate (and/orrotator) functions may be integrated with lens functions in otherdesigns. The waveplates 354, 356, and 358 may, for example, containcurved surfaces and thus possess power, which contributes to theoperation of the optical system 300. Such integration may increase thecomplexity of the design but also provides additional possibilities.Accordingly, polarization rotation elements which contain power areconsidered possible.

[0201] Also, rotations other than 90° may be desired when thebirefringence of two portions 322, 324 of the optical system to notcompletely match but are rotated with respect to each other. Forexample, if the birefringence in first and second portions 322, 324 ofthe optical system 300 have birefringence rotated about 10° with respectto each other, a 100° polarization rotator, may be inserted between thetwo portions 322, 324 to provide for compensation and cancel out theretardance contributed by the two portions 322, 324.

EXAMPLE 4

[0202] Another exemplary all-refractive projection lens 400 comprisingpowered refractive optical elements is depicted in FIG. 32. Such anexemplary imaging lens 400 may be used for photolithography and, inparticular, may be used in the semiconductor manufacturing industry. Asimilar lens disclosed in European Patent No. 1 139 138 A1 issued to Y.Ohmura is designed to operate at a central wavelength of 193.3nanometers, provides 4×reduction at a numerical aperture of 0.75, andhas an image field diameter of 27.5 mm. The design employs twenty-eightoptical elements L1-L28 aligned on an optical axis 402, each lenselement L1-L28 being constructed from calcium fluoride and fused silica.Three of the surface on the optical elements L1-L28 are aspheric. Theseoptical elements L1-L28 are substantially optically transmissive to UVlight. The lens 400 depicted in FIG. 32 possesses substantially the samelens prescription as that disclosed in European Patent No. 1 139 138 A1except that all the lens elements L1-L28 in lens 400 of FIG. 32 comprisecalcium fluoride and are assumed to have an intrinsic birefringence of−12×10⁻⁷ for purposes of calculations. In other embodiments, however,some of the lens elements L1-L28 may be formed of non-cubic crystallinematerial or additional lens elements or other optically transmissiveelements may be formed of non-cubic crystalline material. Varioussuitable non-cubic crystalline materials such as dry fused silica may beused, for example.

[0203]FIG. 32 shows the imaging lens 400 with object plane 404, whichmay be, e.g., a reticle or photomask, image plane 406, which may be, forexample, a substrate upon which the image is formed, and aperture stop,AS, 408.

[0204] RMS and maximum retardance and diattenuation over the exit pupilare listed in Table 6 for the nominal design without intrinsicbirefringence effects included for relative field heights of 0, 0.7, and1.0. The retardance and diattenuation result from the single-layeranti-reflection coatings used in the model. The retardance is radiallyoriented and is largest in magnitude at the edge of the pupil. TABLE 6Retardance Relative Field (waves at λ_(o) = 193.3 nm) DiattenuationHeight RMS Maximum RMS Maximum 0.0 0.0048 0.0177 0.0068 0.0273 0.70.0049 0.0184 0.0069 0.0274 1.0 0.0053 0.0216 0.0075 0.0310

[0205] Table 7 shows RMS and peak-to-valley wavefront error for thenominal design, without the effects of intrinsic birefringence.Wavefront errors are given for relative field heights of 0, 0.7, and 1.0in the Y direction, and are listed for two orthogonal polarizationcomponents. The X component represents the wavefront error for an inputpolarization in the X direction assuming a linear polarizer along the Xdirection at the system exit pupil. The Y component represents thewavefront error for an input polarization in the Y direction assuming alinear polarizer along the Y direction at the exit pupil. Without cubiccrystalline optical elements, or the effect of intrinsic birefringenceconsidered, the nominal design includes a peak RMS wavefront error of0.004 waves. TABLE 7 Peak-to-Valley RMS Wavefront Error Wavefront Error(waves at λ_(o) = 193.3 nm) (waves at λ_(o) = 193.3 nm) Relative Field XY X Y Height Component Component Component Component 0.0 0.003 0.0030.017 0.017 0.7 0.003 0.004 0.022 0.033 1.0 0.003 0.004 0.022 0.029

[0206]FIGS. 33A, 33B, 33C, and 33D show wavefront errors plotted at thesystem exit pupil as contour maps for the nominal design withoutintrinsic birefringence effects included. FIGS. 33A and 33B show contourplots of the residual wavefront error for the exemplary lens 400depicted in FIG. 32 corresponding to an input polarization in the Xdirection, perpendicular to the field height, used with an exit pupilanalyzer in the X direction for the center and extreme field points,respectively. For the wavefront error at the central field point, themaximum peak-to-valley optical path difference is 0.017 waves at awavelength of 193.3 nanometers, and for the wavefront error at theextreme field, the maximum peak-to-valley optical path difference is0.022 waves. FIGS. 33C and 33D show contour plots of the residualwavefront error for the lens depicted in FIG. 32 corresponding to aninput polarization in the Y direction, parallel to the field height,used with an exit pupil analyzer in the Y direction for the central andextreme field points, respectively. For the wavefront error at thecentral field point, the maximum peak-to-valley optical path differenceis 0.017 waves at a wavelength of 193.3 nanometers, and for thewavefront error at the extreme field, the maximum peak-to-valley opticalpath difference is 0.029 waves.

[0207] Table 8 shows the distortion for the nominal design, calculatedbased on centroid of the point spread function, and the telecentricityerror in the Y direction at relative field heights of 0, 0.7, and 1.0.Distortion is the deviation of the image location from the idealposition. Distortion is preferably reduced or minimized in lithographysystems, so that features printed on one layer of an integrated circuitare precisely registered with the other layers which are potentiallyfabricated using a different lithography tool. Because the distortionmust be controlled even when the object and image are not perfectlyfocused, the cones of light must be normal to the object and image.Otherwise, the image centroids will deviate depending on the focusposition (i.e. focus dependent distortion). Deviations from normalincidence of the image cones are known as telecentricity errors. TABLE 8Relative X PSF Centroid Y PSF Centroid Y Telecentricity Field HeightDistortion (nm) Distortion (nm) Error (mrad) 0.0 0.00 0.00 0.00 0.7 0.007.70 0.11 1.0 0.00 10.70 0.51

[0208] When each of the optical elements L1-L28 in the lens 400 depictedin FIG. 32 comprises cubic crystalline material exhibiting intrinsicbirefringence in FIG. 32, the optical performance degradessignificantly. FIGS. 34A and 34B show the net retardance across thesystem exit pupil for field points at the center and edge of the field(at object field heights of 0 and 55 mm) according to an exemplaryembodiment in which all elements L1-L28 comprise cubic crystalsubstantially identically aligned in three dimensions, with the [110]crystal axis directed along optical axis 402. In these plots, theretardance orientation rotates by 90 degrees at one-half-wave (π radiansor 90°) intervals, i.e., the effect of a 0.75 wave retarder at 0 degreesis the same as a 0.25 wave retarder at 90 degrees. Thus, the peakretardance due to intrinsic birefringence in this example isapproximately 2.1 waves at a wavelength of 193.3 nanometers.

[0209]FIGS. 35A and 35B show the net retardance across the system exitpupil for field points at the center and edge of the field 404,respectively, according to another exemplary arrangement in which allelements are identically aligned in three dimensions, with the elements'L1-L28 [100] crystal axes direction parallel to optical axis 402. Again,the retardance orientation rotates by 90 degrees at one-half-waveintervals; thus, the peak retardance due to intrinsic birefringence inthis example is approximately 1.5 waves at a wavelength of 193.3nanometers.

[0210]FIGS. 36A and 36B show the net retardance across the system exitpupil for field points at the center and edge of the field 404,respectively, according to another exemplary arrangement in which allelements are aligned identically in three dimensions, with therespective [111] crystal axes of the different optical elements directedalong optical axis 402. In this exemplary arrangement, the peakretardance due to intrinsic birefringence is approximately 0.8 waves ata wavelength of 193.3 nanometers.

[0211] With the crystal axes of each of the optical elements L1-L28oriented identically in three dimensions, the retardance produced byintrinsic birefringence produces large wavefront aberration. Withoutcompensation, this aberration strongly exceeds the desirable wavefronterror required for photolithography processes, particularly forphotolithography processes used to produce the small feature sizes intoday's semiconductor manufacturing industry.

[0212] To reduce retardance aberration at least one polarizationconverter 410 in inserted in the optical system 400 as illustrated inFIG. 37. The polarization converter 410 comprises a 90° polarizationrotator, which is placed in the optical system 400 thereby dividing thesystem into first and second (front and rear) groups 412 and 414. Thenet retardance produced by the cubic crystalline elements in the frontgroup 412 is preferably substantially similar in magnitude and variationwith pupil and field position to the net retardance produced by the reargroup 414. The location of the polarization rotator 410 is so chosensuch that the retardance introduced by the second group 414 maycompensate of the retardance produced by intrinsic birefringence.

[0213] In addition to the 90° polarization rotator 410, a −90°polarization rotator 420 is added to the lens 400 in between the objectplane 404 and the first lens element L1 to balance the circularretardance produced by the 90° rotator 410. The addition of this secondpolarization converter 420 in the lens model is a computational aid forcalculating the differences in retardance from 90 degrees. With thesecond rotator, the designer may reduce the magnitude of the retardanceto zero. Without the second rotator, the designer would monitor themagnitude and shape of the retardance and adjust the design, forexample, so that the magnitude and shape of the retardance aresubstantially constant across the pupil. This latter merit functionwould have twice as many terms and would take longer to compute andoptimize.

[0214] To minimize variation in retardance with field, each opticalelement L1-L28B is oriented with its [110] crystal lattice directionsubstantially parallel with the system optical axis 402, such that thepeak birefringence node is along the optical axis 402 and the outer peakbirefringence lobes are at an angle of 60° with respect to the opticalaxis 402.

[0215] Furthermore, in the lens 400 illustrated in FIG. 37, two of thelens elements L27A and L27B, which were combined in one element L27 inthe exemplary lens system of FIG. 32 have each been split into two thathave the same total thickness and power. Also, two of the lens elementsL28A and L28B, which were combined in one element L28 in the lens systemof FIG. 32 have each been split into two that have the same totalthickness and power. These lenses are marked by cross-hatching in FIGS.32 and 37. The thicknesses for the sets of segments L27A, L27B and L28A,L28B as well as the curvature of the respective buried surfaces 418 and422 between them is optimized to minimize the net system retardance.These additional degrees of freedom are shown to improve the achievableretardance compensation without requiring redesign of the lens 400.

[0216] A toroidal surface 424 is also provided on one of the opticalelements L19, identified by cross-hatching, to compensate residualastigmatism due to variations in average index of refraction. Anothereffect produced by intrinsic birefringence in the cubic crystal latticeis variation of the average index of refraction as a function of rayangle through the crystal. In addition to compensating for retardanceerrors resulting from intrinsic birefringence, residual wavefrontaberrations resulting from the variations in average index of refractioncan be corrected. If uncorrected, this variation in average index ofrefraction may produce astigmatism in the wavefront. As such, theoptical design includes this toroidal surface 424 to compensate for theeffects of variations in average index of refraction. This toroidalsurface 424 has a radii of curvature of −218.60371 mm along the local Ydirection and −218.603789 mm along the local X direction.

[0217] These techniques may be applied to allow the retardancecontributions of the elements L1-L24 preceding the 90° polarizationrotator 410 to substantially balance the net retardance of the elementsL25-L28B following the 90° rotator 410 and provide an overall wavefrontcorrection that is acceptable for high numerical aperture lithographysystems.

[0218] Further improvement in retardance compensation can be achieved byoptimizing the relative rotations of the lens elements L1-L28B about theoptical axis 402. The process of rotating one or more of the opticalelement L1-L28B about the optical axis 402 is referred to as clockingand is discussed in U.S. patent application Ser. No. 10/071,375, filedFeb. 7, 2002, entitled “Correction of Birefringence in Cubic CrystallineOptical Systems” now U.S. Pat. No. ______, which is incorporated hereinin its entirety by reference. This form of rotation of the opticalelement L1-L28B itself may be employed to reduce net retardance, as thebirefringence axes across the pupil plane are reoriented so as to atleast partially cancel out the retardance introduced by the differentelements L1-L28.

[0219] In one embodiment, the lens elements L1-L28B have clockings givenin Table 9. The clocking of each element is given relative to anorientation that produces peak birefringence along the optical axis 402and that is oriented with the retardance axis substantially parallel tothe X axis (horizontal, in the direction perpendicular to the specifiedfield of view). TABLE 9 Element Element Clocking (degrees) L1  137.42L2  −177.91 L3  −137.96 L4  −21.23 L5  49.30 L6  112.63 L7  −71.76 L8 23.92 L9  49.96 L10 56.81 L11 132.09 L12 −154.83 L13 −17.35 L14 96.91L15 146.55 L16 148.96 L17 −41.95 L18 −21.28 L19 100.60  L19, 169.00Surface 2 (Toroid) L20 178.67 L21 −124.36 L22 −44.90 L23 134.50 L24137.49 L25 −124.00 L26 43.52   L27A 81.40   L27B 160.62   L28A −49.38  L28B 27.57

[0220] Accordingly, a given lens prescription can be improved bysplitting at least one of the individual lens element (L27 or L28 inthis case) into (i.e. replacing it with), two or more sub-elements L27A,L27B, and L28A, L28B. The sub-elements L27A, L27B, and L28A, L28B eachinclude the same overall radius of curvature and include the samethickness so that the overall optical qualities of the original lensprescription are not adversely affected. For each individual elementL27, L28 being replaced, the sub-elements L27A, L27B, and L28A, L28B areoriented to reduce net system retardance relative to the retardancecorrection achievable using the individual lens element L27, L28 whichthey combine to replace. Each of the sub-elements L27A, L27B, and L28A,L28B may be aligned with the same crystal axis along the optical axis402, and the sub-elements L27A, L27B, and L28A, L28B may be clockedrelative to each other. For example, each of the sub-elements may be a[110] or [100] optical element. In another exemplary embodiment, thesub-elements may include different crystal axes aligned along theoptical axis, for example, a [100] optical element and a [110] opticalelement. Compensating [110] elements with [100] elements is disclosed inU.S. patent application Ser. No. 10/071,375, filed Feb. 7, 2002,entitled “Correction of Birefringence in Cubic Crystalline OpticalSystems” now U.S. Pat. No. ______ which is hereby incorporated herein inits entirety by reference.

[0221] In one embodiment the optical element L27 of FIG. 32 is splitinto two [110] optical sub-components L27A and L27B of FIG. 37 andoptical element L28 of FIG. 32 is split into two [110] opticalsub-components L28A and L28B of FIG. 37 to provide fine adjustment ofthe compensation. The combined thickness of lens sub-elements L28A andL28B of FIG. 37 is substantially the same as the thickness of lenselement L28 of FIG. 32. The thicknesses and radii of curvature of buriedsurfaces 418 and 422 provide control over the retardance aberrations atthe center and edge of the pupil. Table 10 lists the clocking, radii ofcurvature and thicknesses of the optical sub-elements produced bysplitting components L27 and L28. TABLE 10 Element Front Radius BackRadius Clocking of Curvature of Curvature Thickness Element (degrees)(mm) (mm) (mm) L27A 81.40 −10831.21505 348.95732 29.677503 L27B 160.62348.95732 322.39407 20.322497 L28A −49.38 399.72415 58.37955 24.114117L28B 27.57 58.37955 −1901.87993 25.885883

[0222]FIGS. 38A and 38B are graphical representations that depict theretardance across the system exit pupil for optical elements L1-L24 inthe front group 412 of lens in the system 400, between the −90° and 90°rotators 410 and 420. The retardance is caused by the intrinsicbirefringence and anti-reflection coatings. As previously shown in Table6, the contribution due the coatings is relatively small; thus, the bulkof the retardance aberration is due to the intrinsic birefringence. FIG.38A shows net retardance at the center field point and FIG. 38B showsnet retardance at the edge field point. It can also be seen in FIGS. 38Aand 38B that the retardance is substantially similar for the center andedge field points, showing that alignment of each element L1-L24 withits [110] crystal lattice direction along the optical axis 402 resultsin low sensitivity to angle of incidence variations resulting fromchanges in field height.

[0223]FIGS. 39A and 39B are graphical representations that depict theretardance across the system exit pupil for optical elements L25-L28B inthe rear group 414 of the system 400, between the 90° rotator 410 andthe image plane 406. FIG. 39A shows net retardance at the center fieldpoint and FIG. 29B shows net retardance at the edge field point.

[0224] Comparing FIGS. 38A, 39A, 38B, and 39B, the net retardance fromthe front group 412 of the system 400 is substantially similar to thenet retardance from the rear group 414 of the system 400 across thepupil and at center and edge field points. Thus, because the 90° rotator410 rotates each constituent polarization state by 90°, the retardanceintroduced by the rear group 414 of the 400 system will compensate theretardance introduced by the front group 412 of the system 400.

[0225]FIGS. 40A and 40B are graphical representations that depict thenet retardance across the system exit pupil at central and edge fieldpoints due to intrinsic birefringence of all elements L1-L28B, includingthe 90° and −90° rotators 410 and 420. As shown, the net retardance hasbeen significantly reduced at both fields compared with the retardancefor all [110] elements without rotators 410 and 420 shown in FIGS. 34Aand 34B.

[0226] The RMS and maximum retardance over the exit pupil are listed inTable 11 below for relative field heights of 0, 0.7, and 1.0. Theseinclude the effects of intrinsic birefringence and the single layeranti-reflection coatings used in the model. A relative field height of0.0 corresponds to the center field point, for which the results aregraphically in FIG. 40A, and a relative field height of 1.0 correspondsto the edge field point, the retardance contributions of which is showngraphically in FIG. 40B. The RMS retardance ranges from 0.0033 to 0.0065waves at λ_(o)=193.3 nm. TABLE 11 Retardance (waves at λ_(o) = 193.3 nm)Relative Field Height RMS Maximum 0.0 0.0033 0.0198 0.7 0.0044 0.02281.0 0.0065 0.0383

[0227] The retardance using all [110] elements without polarizationconverters 410 and 420 was shown in FIGS. 34A and 34B. With the tworotators 410 and 420, optimized clocking of the elements L1-L28B, andsplitting of two elements L27 and L28, the maximum retardance wasreduced from 2.12 waves to 0.0198 waves at λ=193.3 nm for the axialfield (107×reduction) and a reduction in maximum retardance from 2.14waves to 0.0383 waves at the extreme field (56'reduction).

[0228] The RMS and peak-to-valley wavefront error are listed in Table 12for the compensated design that includes the effects of intrinsicbirefringence. The wavefront errors are given for relative field heightsof 0, 0.7, and 1.0 in the Y direction, and are listed for two orthogonalpolarization components. The X component represents the wavefront errorfor an input polarization in the X direction assuming a linear polarizeralong the X direction at the system exit pupil. The Y componentrepresents the wavefront error for an input polarization in the Ydirection assuming a linear polarizer along the Y direction at the exitpupil. An RMS wavefront error that varies from 0.010 to 0.014 wavesacross the field is achieved. The peak-to-valley wavefront error isreduced by a factor ranging from approximately 8 to 22, in exemplarylenses in which all elements are [110], [100], or [111] optical elementsoriented substantially identically. Thus, this embodiment demonstratesthat intrinsic birefringence effects can be reduced to a levelacceptable for high numerical aperture lithography. TABLE 12Peak-to-Valley RMS Wavefront Error Wavefront Error (waves at λ_(o) =193.3 nm) (waves at λ_(o) = 193.3 nm) Relative Field X Y X Y HeightComponent Component Component Component 0.0 0.010 0.010 0.056 0.050 0.70.011 0.013 0.079 0.077 1.0 0.011 0.014 0.097 0.088

[0229] In FIGS. 41A, 41B, 41C, and 41D, wavefront errors are plotted atthe system exit pupil as contour maps. FIGS. 41A and 41B show contourplots of the residual wavefront error for the lens 400 depicted in FIG.37 corresponding to an input polarization in the X direction,perpendicular to the field height, used with an exit pupil analyzer inthe X direction for the central and extreme field points, respectively.For the central field point, the maximum peak-to-valley optical pathdifference is 0.056 waves at a wavelength of 193.3 nanometers, and atthe extreme field, the maximum peak-to-valley optical path difference is0.097 waves. FIGS. 41C and 41D show contour plots of the residualwavefront error for the lens 400 depicted in FIG. 37 corresponding to aninput polarization in the Y direction, parallel to the field height,used with an exit pupil analyzer in the Y direction for the central andextreme field points, respectively. For the central field point, themaximum peak-to-valley optical path difference is 0.050 waves at awavelength of 193.3 nanometers, and at the extreme field, the maximumpeak-to-valley optical path difference is 0.088 waves.

[0230] The centroid distortion for the compensated design with intrinsicbirefringence, calculated based on the point spread function, and thetelecentricity error in the Y direction are listed at relative fieldheights of 0, 0.7, and 1.0 in Table 13 below. As shown, there was anincrease in maximum X distortion of about −0.3 nm and an increase inmaximum Y distortion of 6.7 nm, compared with the distortion for thenominal design without intrinsic birefringence given in Table 8.Adjustment of some of the radii of curvature of the design allows thesechanges in distortion to be compensated and reduced. Changes intelecentricity error from the nominal design are negligible. TABLE 13Relative X PSF Centroid Y PSF Centroid Y Telecentricity Field HeightDistortion (nm) Distortion (nm) Error (mrad) 0.0 0.00 0.00 0.00 0.7−0.28 10.63 0.11 1.0 0.22 17.39 0.51

[0231] Although lens 400 depicted in FIG. 37 included thirty refractiveoptical elements L1-L28B, other embodiments may comprise more or lessoptical elements which may be reflective, diffractive, and/orrefractive. Similarly, the optical elements may have spherical oraspheric surfaces, may be powered or unpowered, may be off-axis or onaxis. Other optically transmissive elements may include diffractive andholographic optical elements, plates, filters, mirrors, beamsplitters,windows, to name a few. Additionally, all the optical elements need notcomprise the same material. These optical elements may be crystalline ornon-crystalline such as amorphous glasses. In the case where at leastsome of the elements are crystalline, they do not need to all be thesame crystal orientation. For example, various combinations of cubiccrystal optical element having a [111], [100], and/or [110] crystaldirection may be suitable employed.

EXAMPLE 5

[0232] A catadioptric optical system 500, which has both refractive andreflective optical elements L1-L19 and M1-M3, such as depicted in FIG.42, can be used as a projection lens for photolithography. Such anexemplary lens 500 is disclosed in U.S. Pat. No. 6,195,213 by Y. Ohmura,the contents of which are hereby incorporated herein by reference. Thissystem 500 includes an object field 502, and image field 504, andmultiple optical axes. The system 500 is separated into two arms 506 and508, the first arm 506 including a portion of the lens elements, L1-L8,as well as the first mirror M1 substantially aligned along a firstoptical axis. The second arm 508 includes the remainder of the lenselements L9-L19 substantially aligned along a second optical axis. Thetwo arms are optically connected via planar folding mirrors M2 and M3.The system 500 advantageously operates at a central wavelength ofλ_(o)=193.3 nm and at a numerical aperture of 0.75 and provides4×reduction. The image field 504 is 34.25 mm in diameter, but the foldmirror M2 at an intermediate image partially obscures the beam, givingan image field 504 that extends from a height of 5 mm to 17.125 mm withrespect to second optical axis in the plane of the folded beam. All lenselements L1-L19 are constructed from fused silica in the design shown byY. Ohmura in U.S. Pat. No. 6,195,213, but may comprise cubic crystalmaterial and in particular cubic crystal calcium fluoride. For thepurpose of calculation, the results of which are provided below, eachtransmissive optical component is assumed to have an intrinsicbirefringence of −12×10⁻⁷. According to other exemplary embodiments,however, some of the lens elements L1-L19 may be formed of non-cubiccrystalline material or additional lens elements or other opticallytransmissive components formed of non-cubic crystalline material may beused. Various suitable non-cubic crystalline materials such as dry fusedsilica may be employed for operation in the ultraviolet.

[0233] The RMS and maximum retardance and diattenuation over the exitpupil are listed in Table 14 below for the nominal design withoutintrinsic birefringence effects included for image field heights of 5,11, and 17.125 mm. The retardance and diattenuation result from thesingle-layer anti-reflection coatings used in the model. The retardancevaries radially outward and is largest in magnitude at the edge of thepupil. The retardance due only to the anti-reflective coating isrelatively small. TABLE 14 Retardance Image Field (waves at λ_(o) =193.3 nm) Diattenuation Height (mm) RMS Maximum RMS Maximum 5 0.00390.0146 0.0054 0.0225 11 0.0039 0.0156 0.0054 0.0240 17.125 0.0040 0.01760.0056 0.0268

[0234] When the effects of intrinsic birefringence associated with thecubic crystalline lens material are taken into account, systemperformance degrades significantly. FIGS. 43A and 43B are graphicalillustrations showing the net retardance across the system exit pupilfor image field points of 5 and 17.125 mm, respectively, according tothe exemplary embodiment in which all refractive lens elements L1-L19,shown in FIG. 42, have crystal axes that are identically aligned inthree dimensions, with the elements L1-L19 having their [110] crystalaxis along the respective optical axis for the particular lens elementsL1-L19. FIGS. 43A and 43B include the effects of intrinsicbirefringence. In the retardance pupil maps given in FIGS. 43A and 43B,and in others to follow in which the net retardance exceeds a magnitudeof 0.5 waves, the retardance is plotted “modulo 1 wave.” It cantherefore be seen that the retardance orientation rotates by 90 degreesat one-half-wave intervals, i.e., the effect of a 0.75 wave retarder at0 degrees is the same as a 0.25 wave retarder at 90 degrees. Thus, thepeak retardance due to intrinsic birefringence in this exemplaryarrangement is approximately 0.8 waves at a wavelength of 193.3nanometers at image heights of 5 mm and 17.125 mm.

[0235]FIGS. 44A and 44B are graphical illustrations of the retardance ofanother exemplary embodiment of crystal lattice orientation of the lenssystem 500 shown in FIG. 42. In FIGS. 44A and 44B, the net retardanceacross the system exit pupil, including the effects of intrinsicbirefringence, is depicted for field points at the center and edge ofthe field with all elements L1-L19 having crystal axes alignedidentically in three dimensions, with their [100] crystal axes along therespective optical axis for the particular lens element L1-L19. Again,the retardance orientation rotates by 90 degrees at one-half-waveintervals; thus, the peak retardance due to intrinsic birefringence isapproximately 1.4 waves at a wavelength of 193.3 nanometers at an imageheight of 5 mm and 1.2 waves at the extreme field, if the retardancewere not plotted “modulo 1 wave”

[0236]FIGS. 45A and 45B are graphical illustrations of the retardance ofanother exemplary embodiment of crystal lattice orientation of the lenssystem 500 shown in FIG. 42. In FIGS. 45A and 45B, the net retardanceacross the system exit pupil is depicted for field points at the centerand edge of the field with all elements L1-L19 having crystal axesaligned identically in three dimensions, for [111] optical elementshaving the [111] crystal direction substantially parallel to the opticalaxis for the particular lens element L1-L19. The peak retardance due tointrinsic birefringence is approximately 0.5 waves at a wavelength of193.3 nanometers at image heights of 5 mm and 17.125 mm.

[0237] These cubic crystal elements are described as [111] opticalelements based on the direction of the crystal axis at the optical axis.Since many of the rays in the beam propagating through the opticalsystem are clustered around the optical axis, many of the rays will benearly parallel to the crystal axis. Because of the symmetry of the lensdesign, the element optical axis corresponds to the system optical axis.

[0238] Each of three preceding examples, as illustrated in FIGS.43A-45B, shows that the intrinsic birefringence produces largeretardance aberrations and consequently large wavefront aberrations,when each of the crystal elements are oriented identically with respectto the respective optical axis. Without compensation, this aberrationstrongly exceeds the allowable wavefront error for high precisionphotolithography.

[0239] To correct this wavefront aberration, two polarization rotators510 and 520 are added to the optical system 500 to reduce the retardanceproduced by the intrinsic birefringence of the refractive opticalelements L1-L19 as shown in FIG. 46. All these refractive opticalelements L1-L19 are oriented in this embodiment with identicalthree-dimensional crystal lattice directions, and are [111] elements.The [111] crystal lattice direction for each element L1-19 is along thesystem optical axis.

[0240] Choosing as many cubic crystalline elements with their respective[111] crystal lattice directions along the system optical axis isparticularly advantageous for construction of optical systems. Highpurity cubic crystals, such as CaF₂ crystals for VUV optical lithographysystems, naturally cleave along the (111) plane, and single crystals aremore easily grown along the [111] direction. As a result, lens blanksfor construction of [111] optical elements are typically less expensiveand more easily available than lens blanks oriented along other latticedirections. Furthermore, the stress optic coefficient is lower along the[111] direction than along the [100] or [110] directions, reducing imagedegradation resulting from mount-induced stress. Accordingly, an exampleof this preferred arrangement is presented, in which all powered cubiccrystalline elements comprise [111] refractive optical element areoriented with their respective [111] crystal axes along the opticalaxis.

[0241] Alternate embodiments, however, may include optical componentscomprising other cubic crystal material having their crystal axesoriented differently. The lens may for example include one or more [100]and/or [110] optical elements with the respective [100] and [110]lattice directions substantially parallel to the optical axis 540. Suchlens elements, appropriately clocked, can be included to compensate forretardance produced, for example, by [111] optical elements as discussedin U.S. patent application Ser. No. 10/071,375, filed Feb. 7, 2002,entitled “Correction of Birefringence in Cubic Crystalline OpticalSystems” now U.S. Pat. No. ______, which is incorporated herein in itsentirety by reference. Preferably, however, the majority or morepreferably a substantial majority of the cubic crystal optical elementsthrough which the beam passes in the optical system comprise [111]optical elements. For example, 70, 80, 90, percent or more of the cubiccrystalline optical elements in the path of the beam in the opticalsystem 500 preferably comprise [111] cubic crystal optics. Thesepercentages may apply to just the cubic crystal lens elements or maymany include both lens elements as well as other optical elements, suchas, e.g., waveplates. Alternatively, the percentage, by weight, of [111]cubic crystal of all the cubic crystal material in the optical path ofthe lens 500 is preferably more than 50%, more preferably at least about80% and most preferably 90% or more. This percentage may include onlypowered refractive optical elements as well as powered and non-poweredoptical elements such as waveplates, windows, etc. For example, 90% ofnet weight of the cubic crystal lens may comprise cubic crystal having a[111] axis oriented along the optic axis. In another example, 80% of thenet weight of the cubic crystal optics, including the waveplates thatform the polarization rotators, may be [111] cubic crystal, with the[111] axis parallel to the optic axis. The cost of materials for such asystem is significantly reduced in comparison with optical systems thatemploy more [110] or [100] crystal material. The use of the polarizationconverter in reducing the retardance aberration enables such a largepercentage by weight of [111] crystal material to be used without undulydegrading the optical performance of the system. In other embodiments,some of the lens elements or other optical elements may be formed ofnon-cubic crystalline material or additional lens and/or opticalelements formed of non-cubic crystalline material may be used. Varioussuitable non-cubic crystalline materials such as dry fused silica mayoffer other lower cost alternatives.

[0242] As discussed above, however, all the refractive optical elementsL1-L19 in the lens 500 shown in FIG. 46, comprise [111] cubic crystalwith the [111] crystal direction parallel to the optical axis. The 90°rotator 510 is positioned between the sixteenth and seventeenth lenselements L16 and L17 to reduce the net system retardance. The −90°rotator 520 is located between the object plane 502 and the firstelement L1. For purposes of calculations, the rotators 510 and 520 areassumed to be ideal polarization rotators, such that each constituentpolarization state is rotated by exactly 90 or −90°. Additionally, thepolarization rotators 510 and 520 are assumed to have zero thickness. Asdiscussed above, the lens prescription may be adjusted and optimized forfinite thickness rotators 310 and 320 as well.

[0243] As discussed above, the 90° polarization rotator 510 splits thelens 500 into two parts, a front and rear section of the lens 500. Thelocation of the rotator 510 is chosen such that the net retardanceproduced by the cubic crystalline elements L1-L16 in the front part ofthe system 500 is similar in magnitude and orientation as a function offield and pupil position to the net retardance produced by the cubiccrystalline elements L17-L19B in the rear part of the system 500. Therotator 510 allows the retardance contributions of the individualelements L1-L19B to be balanced to provide wavefront correction andreduce the net retardance produced by the intrinsic birefringence to alevel that is acceptable for the particular application, e.g., for highnumerical aperture lithography systems.

[0244] With this design, the system will have a uniform circularretardance of 90 degrees and the input will experience reduced wavefrontaberrations, although the polarization state will be rotated by 90degrees between the object (reticle) and image (wafer) planes, becauseof the introduction of 90 degrees of circular retardance. In order toevaluate the magnitude of the deviation of the retardance from 90degrees, a perfect circular retarder 520 of −90 degrees (i.e., a −90degree rotator) has been inserted between the object and first lenselement. The second rotator cancels out the nearly constant 90 degreesof circular retardance introduced by the first rotator, leaving only thesmall residual retardance aberrations. This second rotator 520 is usedin this example as a computational aid and may or may not be included ina particular optical system, unless the input and output polarizationsneed to be identical (which is not usually the case). It is much easierto visualize small retardance variation with the large constant 90degree circular retardance removed. The second rotator also simplifiesthe construction of the optimization merit function as it only has toinclude the magnitude of the retardance and not the shape of theretardance. Insertion of the second rotator 520 into the lens model alsofacilitates optimization of the system 500 by allowing the designer toreduce the magnitude of the deviation of the retardance from 90 degrees.However, an additional rotator 520 would introduce further complexityand cost to the optical system 500.

[0245] The optical axis in each of the arms 506 and 508 aresubstantially along the Z direction, the field is oriented in the Ydirection, and a right-handed coordinate system is used; thus, a 90°rotation about the optical axis represent a rotation of the X axistowards the Y axis. The order of the rotators 510 and 520 may beswitched without changing the performance, such that the 90° rotator 510is used in object space, and the −90° rotator 520 is used between thesixteenth and seventeenth lens L16 and L17. Also, the rotator 520 inobject space may, in principle, be alternatively used in image space(between last element L19B and image plane 504).

[0246] As disussed above, the lens elements L1-L19B in an optical system500 can be rotated about the optical axis, herein termed clocking, toreduce retardance. The birefringence contributions across the lens pupilare repositioned and potentially reoriented such that the birefringenceof two or more lenses compensate and offset each other. In one preferredembodiment, for example, the lens elements L1-L19B in the lens 500 ofFIG. 46 have clockings given in Table 15. The clocking of each elementL1-L19B is given relative to an orientation that produces peakbirefringence along the optical axis that is oriented with theretardance axis substantially parallel to the X-axis (horizontal, in thedirection perpendicular to the specified field of view). TABLE 15Element Element Clocking (degrees)  1 325.71  2 7.06  3 143.41  4 76.83 5 230.04  6 113.19  7 −2.21  8 56.48  9 208.29 10 170.00 11 −9.41 12379.75 13 −14.21 14 95.43 15 198.23 16 140.64 17 236.41 18 168.37 19178.09   (19A) 20 4.18   (19B)

[0247] In addition, in one preferred embodiment, the last element L19 inFIG. 42 has been replaced by, i.e., split into, two sub-elements, L19Aand L19B of FIG. 46 with buried surface 512 between them. These lenselements L19, L19A, and L19B, are cross-hatched in FIGS. 42 and 46. Thesub-elements L19A and L19B each include the same overall outer radii ofcurvature. The sub-elements L19A and L19B are oriented (clocked) toreduce net system retardance relative to the retardance correctionachievable using the element L19 which they combine to replace. Here,each of the sub-elements L19A and L19B has its [111] crystal axisparallel to the system optical axis, but the other crystal axes of thetwo elements L19A and L19B are rotated about the optical axis withrespect to one another. The radius of curvature of buried surface 512and the thicknesses of sub-elements L19A and L19B were optimized tominimize net retardance.

[0248] Here, the combined thickness of sub-elements L19A and L19B wasallowed to vary relative to the thickness of element L19 in FIG. 42. Thecenter thickness of element L19 was initially 65 mm, but the combinedthickness of L19A and L19B was reduced to 45.5820 mm. Also, thethickness of element L1 in FIG. 42 was reduced in thickness from 59.9763mm to 41.2024 mm. These changes to the nominal lens prescriptionintroduce additional wavefront, not retardance aberrations, that may becorrected by means which are commonly practiced by those skilled in theart. The lens design has not been further modified to correct for theadditional wavefront errors, so as to illustrate the correction of theretardance aberrations. Additionally, the current embodiment has notbeen reoptimized to correct for the changes in element thicknesses;therefore, this example shows reduction of net system retardance to anacceptable level for lithographic imaging.

[0249] Table 16 lists the radii of curvature and thicknesses opticalsub-elements L19A and L19B produced by splitting component L19 in thedesign shown in FIG. 42. TABLE 16 Element Clocking Front Radius of BackRadius of Thickness Element (degrees) Curvature (mm) Curvature (mm) (mm)19 178.09 −316.06140 −218.78841 −26.391552 20 364.18 −218.7884112272.48200 −19.190442

[0250]FIGS. 47A and 47B are graphical representations that depict theretardance across the system exit pupil for optical elements L1-L16 inthe front part of the system 500, between the −90° rotator 520 and the90 rotator 510. FIG. 47A shows net retardance at an image height of 5 mmand FIG. 47B shows net retardance at an image height of 17.125 mm.

[0251]FIGS. 48A and 48B are graphical representations that depict theretardance across the system exit pupil for optical elements L17-L19B inthe rear part of the system 500, between the 90° rotator 510 and theimage plane 504. FIG. 48A shows net retardance at an image height of 5mm and FIG. 48B shows net retardance at an image height of 17.125 mm.

[0252] Comparing FIGS. 47A, 48A, 47B, and 48B, the net retardance fromthe front part of the system 500 is similar to the net retardance fromthe rear part of the system 500 across the pupil and at image heights of5 mm and 17.125 mm. Thus, because the 90° rotator 510 rotates eachconstituent polarization state by 90°, the retardance of the rear partof the system 500 will compensate the retardance of the front part ofthe system 500.

[0253]FIGS. 49A and 49B are graphical representations that depict thenet retardance across the system exit pupil at central and edge fieldpoints due to intrinsic birefringence of all elements L1-L19B, 510, 520,including the 90° and −90° rotators 510, 520. As shown, the netretardance has been significantly reduced at both fields compared withthe retardance for all [111] elements without rotators 510 and 520 shownin FIGS. 45A and 45B. Thus, substantial retardance correction for asystem 500 comprising all [111] optical elements L1-L19, is possible, byusing a polarization converter that transforms the polarization of thelight within the optical system 500 into a polarization state rotated by90°. In particular, the intrinsic birefringence effects and systemretardance of this catadioptric optical system 500 are significantlyreduced to levels acceptable for high numerical aperture lithography.

[0254] The RMS and maximum retardance over the exit pupil are listed inTable 17 below for image field heights of 5 mm, 11 mm, and 17.125 mm.These include the effects of intrinsic birefringence and the singlelayer anti-reflection coatings used in the model. The RMS retardanceranges from 0.0037 to 0.0059 waves at λ_(o)=193.3 nm. TABLE 17Retardance (waves at λ_(o) = 193.3 nm) Relative Field Height RMS Maximum0.0 0.0043 0.0244 0.7 0.0037 0.0206 1.0 0.0059 0.0314

[0255] This catadioptric lens 500 of FIG. 46 has twenty (20) lenselements L1-L19B, six of which are used in double pass (L3-L8), eachcomprising [111] cubic crystal material with the [111] crystal axisparallel to the optical axis passing through the respective lenselement. The catadiopric lens 500 further includes one powered mirrorM1, and two fold mirrors M2, M3. The refractive optical elements L1-L19Bare clocked, i.e., rotated about the optical axis passing therethroughto reduce retardance. The 90° polarization rotator 510, which dividesthe optical system 500 into two parts having similar net birefringence,causes the retardance introduced by the two parts to compensate for andoffset each other. The −90° polarization rotator 520 in object spacecompensates for the constant retardance produced by the 90° rotator 510.The element L19 in FIG. 42 closest to the image plane is split into two[111] components L19A and L19B with different relative clockings, andthe thicknesses of the components and radius of curvature of the buriedsurface 412 are optimized to minimize net retardance. The peak-to-valleyretardance can thereby be improved by a factor ranging from 15.6×to18.9×.

[0256] Other compensation techniques may be applied to reduceretardance. In an exemplary embodiment, one or more stress birefringentelements, wave plates, or combinations thereof may additionally be usedto provide compenation and correct for residual birefringence variationand constant residual retardance which remains in the catadioptricsystem after the above-described system corrections have been made.Techniques disclosed in U.S. patent application Ser. No. 10/071,375,filed Feb. 7, 2002, entitled “Correction of Birefringence in CubicCrystalline Optical Systems” now U.S. Pat. No. ______, which isincorporated herein in its entirety by reference may also be employed,One of these techniques includes, for example, adding [100] opticalelements that are appropriately rotated with respect to the optical axisto provide compensation.

[0257] In addition, stress may be applied to a reflective element suchas mirror surfaces M1, M2, or M3 to alter the base radius of curvaturein orthogonal directions. This stress may correct for residualastigmatism in the catadioptric optical system. The use of at least oneoptical element whose base radius of curvature differs in orthogonaldirections may additionally or alternatively be used to compensate forresidual astigmatism. For example, residual astigmatism due tovariations in the average index of refraction from [110] opticalelements can be countered by varying the base radius of curvature of atleast one surface of an optical element, in orthogonal directions.Residual trefoil wavefront aberrations due to variations in the averageindex of refraction in [111] optical elements can also be compensated byvarying the shape, e.g., radius of curvature, of at least one surface ofan optical element with an azimuthal angular dependence of 30 to reducethis aberration. If the optical axis is along the z-axis, the azimuthalangle, θ, is in the x-y plane and measured from the x-axis. Quadrafoilwavefront aberrations due to variations in the average index ofrefraction from [100] crystals can likewise be countered. Compensationmay be achieved by varying the shape of at least one optical elementwith an azimuthal angular dependence of 40.

[0258] Another example of a catadioptric systems that include beamsplitters or wave plates, is described in U.S. Pat. No. 6,081,382 byOhmura, et al, which is incorporated herein in its entirety byreference. The polarization aberrations in this system also may becorrected, for example, with the addition of at least one polarizationrotator to divide the optical system into multiple groups, such as twogroups with similar net retardance. In addition, relative clocking ofthe optical elements, the inclusion of various combinations of [111],[110], and [100] optical elements, stress-induced birefringent elementswith radially varying stress, stress induced birefringent elements withstress varying along axes perpendicular to the optical axis, theoptimization of lens element thicknesses, spacings, radii of curvatureand aspheric coefficients can be used to decrease the affect ofaberrations that degrade optical performance. Similarly, residualastigmatism, trefoil aberration, and quadrafoil aberration due tovariations in the average index of refraction in [110], [111], and [100]cubic crystalline optical elements, can be reduced through the use of atleast one optical element whose base radius of curvature varies as 2θ,3θ, and 4θ.

[0259] Some of the preceding examples are based on lens prescriptionspublished in the prior art. These examples are intended to be exemplaryonly and the principles applied with reference to these examples can beextended to any of various other lens designs. However, application oftechniques described above for reducing retardance aberration are ofparticular interest for high numerical aperture optical systems forphotolithography at an exposure wavelength near 157 nm, such as thatproduced by an F₂ excimer laser. Because many of the available opticalsystems described in the art include lower numerical apertures andoperate at longer wavelengths such as 193 nm, the techniques areillustrated by application to exemplary known optical systems designedfor an exposure wavelength near 193 nm, corresponding to the wavelengthproduced by an ArF excimer laser, commonly used in photolithography. Itshould be understood, however, that these principles and techniquesapply equally to high numerical aperture systems and systems operatingat 157 nm.

[0260] Furthermore to estimate the effects of intrinsic birefringence inhigh numerical aperture lenses designed for a central wavelength of 157nm, in which the refractive elements are primarily constructed fromcalcium fluoride, each element is assumed to have a peak intrinsicbirefringence of (n_(e)−n_(o))=−12×10⁻⁷, which is roughly equivalent tothe measured peak intrinsic birefringence in calcium fluoride at awavelength of 157 nm. In other embodiments, however, one or more of theoptical elements may be constructed from other materials such as bariumfluoride, lithium fluoride, strontium fluoride, and fused silica. Inaddition, optical elements comprising material exhibiting positivebirefringence can be included to compensate for the effects of opticalelements comprising material exhibiting negative birefringence.

[0261] In this manner, the method for compensation of intrinsicbirefringence in similar high numerical aperture lenses designed for 157nm may be demonstrated using known exemplary lens descriptions designedfor a central wavelength of 193 nm as starting points. The change incentral wavelength may result in a change in refractive index of therefractive components and may warrant the use of fluoride materials suchas calcium fluoride, but the types of elements used and distributions ofray angles for a given numerical aperture are similar enough to allow alens designed for a central wavelength of 193 nm to be used todemonstrate the innovative techniques for mitigating the effects ofintrinsic birefringence in high numerical aperture lenses, at a centralwavelength of 157 nm. The design techniques presented above, however,may be employed for reducing polarization aberration in optical systemsoperating at other wavelengths.

[0262] In calculating the performance of some of optical systems in theexamples discussed above, the refractive surfaces are assumed to have ahypothetical, single layer anti-reflection coating with an index ofrefraction equal to the square root of the element index of refractionand with an optical thickness of a quarter wave at a wavelength of 193.3nm. The indices of refraction for calcium fluoride and fused silica usedin some of the examples described above are assumed to be 1.501455 and1.560326, respectively, at a wavelength of 193.3 nm. Different coatingswill introduce different retardance and phase aberrations and mayrequire slightly different compensation. It should be understood,however, that the method demonstrated for the single hypotheticalcoating is applicable to systems with various other physical coatings orno coating at all.

[0263] The preceding examples are intended to be illustrative, notrestrictive. Furthermore, it is intended that the various exemplarytechniques for countering the effects of intrinsic birefringence,including retardance aberrations and wavefront aberrations produced byvariations in average index of refraction may also be applied to theother embodiments. More generally, these basic principles used tocompensate for polarization aberrations such as retardation anddiattenuation can be extended to at least partially correct for theseeffects in various other optical systems. The principles apply both torefractive and catadioptric lens systems as well as other systemscontaining substantially optically transmissive material that impartspolarization aberrations on a beam propagating therethrough.

[0264] In other optical systems, the optical features of the opticalcomponents may vary. For example, the individual thicknesses, radii ofcurvature, aspheric coefficients, and ray angles may differsignificantly from component to component. Additionally the materialscomprising these optical elements is not limited and may includenon-cubic crystalline optical elements as well as crystalline elements.

[0265] These principles may be used when designing new optical systemsor to improve a known lens prescription. In some of the examples above,the corrected optical system is based on a given lens prescription,which may be maintained and the effects of intrinsic birefringencecompensated for, using the techniques described above. Alternatively,retardation may be reduced by splitting of one or more lens elements ofthe given prescription, into two or more sub-elements. The location ofthe buried surface, its curvature and the thicknesses of the respectivesub-elements are degrees of freedom that may be adjusted to reduceaberration or provide other performance attributes. For example, theoptical power may be substantially evenly split into the sub-elements,which may or may not have same center thickness. The techniques anddesigns described above, however, may be advantageously applied tovarious other new lens prescriptions being designed.

[0266] Ray tracing software may be used to generate or revise the lensprescription including positioning of the individual lens elements, aswell as thicknesses, radii of curvature, aspheric coefficients, materialproperties, and the like. In one embodiment, the RMS retardance may becomputed over a pupil grid at each field point and used as the meritfunction for a damped least squares optimization using the commerciallyavailable ray tracing software, CODE V®, for example. A computer may beused to optimize the orientation and clocking of each of the elements inthe system. The thicknesses of the components, the spacings between thecomponents, and the radii of curvature and aspheric coefficients of thelens elements, may similarly be optimized to balance aberrations andreduce retardance across the field. One or more birefringent elements,wave plates, or combinations thereof, may additionally be used tocorrect for residual birefringence variation and constant residualretardance. Phase aberrations, such as astigmatism, trefoil aberration,and quadrafoil aberration, introduced by the average index variations in[110], [111], and [100] elements, respectively, may be compensated usingone or more surfaces with radii of curvature that vary as 2θ, 3θ, and4θ, respectively.

[0267] When cubic crystalline materials like calcium fluoride are used,a substantial portion of these crystal elements preferably compriselesser expensive [111] cubic crystal with the [111] crystal latticedirection parallel to the optical axis. Although [100] and [110]elements appropriately clocked can be added to compensate for thebirefringence introduced by [111] elements, the cost of these [100] and[110] elements is higher. The techniques described above advantageouslypermit the birefringence of the [111] elements to be compensated for byother the lesser expensive [111] elements. Accordingly, the fraction ofcubic crystalline elements that comprise [111] crystal with the [111]crystal lattice direction along the optical axis is preferably large,i.e., at least 70-90%, by weight. Although the polarization rotator maybe formed from various materials, it may comprise cubic crystal, such as[110], [100], or [111] cubic crystal elements. In some embodiments wherethe polarization rotator comprises cubic crystal, preferably itcomprises mostly [111] cubic crystal, most preferably, all [111] cubiccrystalline material. As discussed above, having many of the cubiccrystal elements comprise [111] material reduced the cost of the optics.Most preferably, a majority of the transmissive optical elements have anoptical axis generally aligned with the [111] crystal lattice direction.In one preferred embodiment, substantially all the opticallytransmissive cubic crystal elements comprise this [111] crystal.

[0268] As discussed above, polarization rotation can be employed tocorrect polarization aberrations other than retardance. Diattenuation,for example, can also be reduced or substantially eliminated byinserting a polarization rotation device in an optical system. In onepreferred embodiment, the diattenuation introduced by optical elementson opposite sides of the polarization rotator is matched or balanced.Accordingly, a first polarization propagating through a first set ofelements on a first side of the rotator will be attenuated more than asecond orthogonal polarization. The two polarizations will be rotatedand the passed through a second set of elements on second opposite sideof the rotator. If the first and second sets of lens elements on the twosides are matched, the second polarization will be attenuated by anamount of attenuation experienced by the first polarization in the firstset of lens elements. Accordingly, both the first and secondpolarizations will be attenuated by substantially the same amountthereby reducing at least in part the net diattenuation of the opticalsystem. Other examples of correction of polarization dependentaberrations and considered possible.

[0269] As mentioned above, the various exemplary cubic crystallineoptical systems and methods for forming aberration-free patterns onsemiconductor substrates are particularly advantageous as feature sizesbecome increasingly smaller and approach the half wavelength of thelight used to produce the patterns. Such techniques find particularadvantage in high numerical aperture (NA) lens systems but the variousaspects these methods and innovations find application in opticalsystems having both relatively high and relatively low numericalapertures.

[0270] Although described in conjunction with photolithography toolsused to pattern substrates in the semiconductor industry, the techniquesand designs discussed above will find use in a wide variety ofapplications, both imaging and non-imaging, in infrared, visible, andultraviolet. Optical systems used for medical, military, scientific,manufacturing, communication, and other applications are consideredpossible candidates for benefiting from the innovations describedherein.

[0271] Although described above in connection with particularembodiments of the present invention, it should be understood thedescriptions of the embodiments are illustrative of the invention andare not intended to be limiting. Accordingly, various modifications andapplications may occur to those skilled in the art without departingfrom the true spirit and scope of the invention. The scope of theinvention is not to be limited to the preferred embodiment describedherein, rather, the scope of the invention should be determined byreference to the following claims, along with the full scope ofequivalents to which those claims are legally entitled.

What is claimed is:
 1. An optical system that outputs light comprising:first and second sections each comprising a plurality of symmetricallyshaped calcium fluoride lens elements, each of said calcium fluoridelens elements being symmetrical about a respective optical axis passingtherethough, said plurality of symmetrically shaped calcium fluoridelens elements arranged along an optical path; and a retardationreduction system between said first and second sections; wherein saidsymmetrically shaped calcium fluoride lens elements in said first andsecond sections together comprise at least about 80% by weight [111]cubic crystalline calcium fluoride having a [111] crystal directionsubstantially parallel to said respective optical axis.
 2. The opticalimaging system of claim 1, wherein said symmetrically shaped calciumfluoride lens elements in said first and second sections togethercomprise at least about 85% by weight [111] cubic crystalline calciumfluoride having a [111] crystal direction substantially parallel to saidrespective optical axis.
 3. The optical imaging system of claim 1,wherein said symmetrically shaped calcium fluoride lens elements in saidfirst and second sections together comprise at least about 90% by weight[111] cubic crystalline calcium fluoride having a [111] crystaldirection substantially parallel to said respective optical axis.
 4. Theoptical imaging system of claim 1, wherein said symmetrically shapedcalcium fluoride lens elements in said first and second sectionstogether comprise at least about 95% by weight [111] cubic crystallinecalcium fluoride having a [111] crystal direction substantially parallelto said respective optical axis.
 5. The optical imaging system of claim1, further comprising one or more non-cubic crystalline optical elementswhich substantially comprise material other than cubic-crystal.
 6. Theoptical imaging system of claim 5, wherein said one or more non-cubiccrystalline optical elements comprise fused silica.
 7. The opticalimaging system of claim 1, wherein said polarization reduction systemcomprises an optical rotator.
 8. The optical imaging system of claim 7,wherein said optical rotator comprises one or more non-cubic crystallineoptical elements which substantially comprise material other thancubic-crystal.
 9. The optical imaging system of claim 7, wherein saidoptical rotator comprises [111] cubic crystal calcium fluoride having a[111] crystal axis aligned with each an optical axis optical axispassing therethrough.
 10. The optical imaging system of claim 7, whereinsaid optical rotator comprises [100] cubic crystal calcium fluoridehaving a [100] crystal axis aligned with each an optical axis opticalaxis passing therethrough.
 11. The optical system of claim 1, wherein atleast one of said symmetrically shaped calcium fluoride lens elements isrotationally symmetric about said respective optical axis passingtherethrough.
 12. The optical system of claim 1, wherein at least one ofsaid symmetrically shaped calcium fluoride lens elements has at leastone cylindrically shaped optical surface.
 13. The optical system ofclaim 1, wherein said plurality of symmetrically shaped calcium fluoridelens elements in each of said first and second sections togethercomprise at least about fifteen lens elements.
 14. The optical system ofclaim 1, wherein said plurality of symmetrically shaped calcium fluoridelens elements in each of said first and second sections togethercomprise at least about twenty-five lens elements.
 15. The opticalsystem of claim 1, wherein said polarization reduction system reducesretardance produced by said plurality of symmetrically shaped calciumfluoride lens elements in each of said first and second sectionstogether, such that the retardance of said light output by said opticalsystem onto a reference surface is less than or equal to about 0.020waves rms at each location on said reference surface.
 16. The opticalsystem of claim 1, wherein said polarization reduction system reducesretardance produced by said plurality of symmetrically shaped calciumfluoride lens elements in each of said first and second sectionstogether, such that the retardance of said light output by said opticalsystem onto a reference surface is less than or equal to about 0.010waves rms at each location on the reference surface.
 17. An opticalimaging system for creating an optical image of an object located in anobject field by shaping a plurality of wavefronts associated with lightemanating from said object, said plurality of wavefronts after saidshaping coming together to form the optical image located in an imagefield, said optical system comprising: a plurality of first lenselements arranged along a common optical axis, said first lens elementscomprising [111] cubic crystalline calcium fluoride having a [111]crystal direction substantially along said common optical axis passingthrough said first lens elements; and a plurality of second lenselements arranged along said optical axis, said second lens elementscomprising material selected from the group consisting of [100] cubiccrystalline calcium fluoride having a [100] crystal directionsubstantially along said common optical axis passing through said secondlens element and [110] cubic crystalline calcium fluoride having a [110]crystal direction substantially along said common optical axis passingthrough said second lens element; wherein said plurality of first lenselements outweigh said plurality of second lens elements at least by aratio of about 4 to 1 and said plurality of first lens elements and saidplurality of second lens elements have positions, shapes, and rotationalorientations about said common optical axis so that less than about0.015 waves rms of retardance is produced by said plurality of firstlens element and said plurality of second lens elements together foreach of the wavefronts that together form said optical image.
 18. Theoptical imaging system of claim 17, further comprising at least onewaveplate.
 19. The optical imaging system of claim 18, wherein said atleast one waveplate includes two quarter wave plates and a half waveplate inserted therebetween.
 20. The optical imaging system of claim 18,wherein said waveplate comprises at least one curved surface.
 21. Theoptical imaging system of claim 17, wherein said plurality of first lenselements outweigh said plurality of second lens elements at least by aratio of about 9 to
 1. 22. The optical imaging system of claim 17,wherein said plurality of first lens elements and said plurality ofsecond lens elements have shapes, positions, and rotational orientationsabout said common optical axis so that less than about 0.005 waves rmsof retardance is produced by said plurality of first lens elements andsaid plurality of second lens elements together for each of thewavefronts that together form said optical image.
 23. The opticalimaging system of claim 17, wherein said plurality of first lenselements and said plurality of second lens elements together comprise atleast about 15 lens elements.
 24. The optical imaging system of claim23, wherein said plurality of first lens elements and said plurality ofsecond lens elements together comprise at least about 25 lens elements.25. An optical system for outputting a beam of light, said opticalsystem comprising: a first plurality of [111] cubic crystalline lenselements arranged along an optical path for receiving an optical beamhaving a first polarization; polarization transforming optics fortransforming the first polarization of said optical beam into a secondpolarization; a second plurality of [111] cubic crystalline lenselements arranged along an optical path for receiving said optical beamhaving said second polarization, each of said [111] cubic crystallinelens elements symmetrical with respect to an optical axis passing thoughsaid respective lens element, each of said [111] cubic crystalline lenselements comprising [111] cubic crystalline calcium fluoride having a[111] crystal axis substantially parallel to an optical axis passingthrough said respective lens elements, wherein said first plurality of[111] cubic crystalline lens elements imparts a first retardance on saidoptical beam and said second plurality of [111] optical elements impartsa second retardance on said optical beam that at least partiallycompensates for said first retardance.
 26. The optical system of claim25, wherein said polarization transforming optics comprises one or morecubic crystalline calcium fluoride optical elements symmetrical withrespect to an optical axis passing though said respective opticalelements, each of said cubic crystalline calcium fluoride opticalelements comprising [111] cubic crystalline calcium fluoride having a[111] crystal axis substantially parallel to said optical axis passingthrough said respective lens elements.
 27. The optical system of claim25, wherein said polarization transforming optics comprises a pair ofquarter-wave plates on opposite sides of a half-wave plate.
 28. Theoptical system of claim 25, wherein said first plurality of [111] cubiccrystalline lens elements and said second plurality of [111] cubiccrystalline lens elements together contribute no more than about 0.015wave RMS retardance at any point across said beam of light output bysaid optical system.
 29. A method of reducing retardance in an opticalbeam propagating through at least one [111] optical element, saidoptical beam having a polarization corresponding to the sum of twoorthogonal polarization states, said method comprising: altering saidpolarization of said optical beam after said optical beam has propagatedthrough said at least one [111] optical element and acquired a firstphase shift between said two orthogonal polarization states; andpropagating said optical beam having altered polarization through atleast one [111] optical element thereby imparting a second phase shiftbetween said two orthogonal polarization states that at least partiallycounters said first phase shift.
 30. An optical system comprising, aplurality of calcium fluoride lens elements each having respectiveoptical axes, said plurality of calcium fluoride lens elements beingaligned along an optical path for propagation of light therethrough,wherein each of said calcium fluoride lens elements in said opticalsystem comprises cubic crystalline calcium fluoride that is aligned withits [111] lattice direction substantially parallel with said respectiveoptical axes and said plurality of calcium fluoride lens elements havepositions, shapes, and rotational orientations about said respectiveoptical axes so that less than about 0.015 waves rms of retardance isproduced by said plurality of calcium fluoride lens elements together.31. The optical system of claim 30, further comprising polarizationrotation optics.
 32. The optical system as of claim 30, furthercomprising polarization rotation optics including two crossedquarter-wave plates and a half-wave plate aligned along a common opticalaxis, said two crossed quarter-wave plates having fast axes oriented 90degrees with respect to each other about said common optical axis, andsaid half-wave plate having a fast axis oriented at 45 degrees aboutsaid common optical axis with respect to the axes of said quarter-waveplates.
 33. The optical system of claim 32, wherein at least one of saidquarter-waveplates and said half-wave plate comprises cubic crystallinecalcium fluoride.
 34. The optical system of claim 32, wherein at leastone of said quarter-waveplates and said half-wave plate comprises [100]cubic crystalline calcium fluoride having a [1100] directionsubstantially aligned with said common optical axis.
 35. The opticalsystem of claim 32, wherein at least one of said quarter-waveplates andsaid half-wave plate comprises non-cubic crystalline material.
 36. Theoptical system of claim 31, wherein said polarization rotation opticsincludes transmissive optical elements each having a correspondingoptical axis and each comprising a [111] cubic crystalline calciumfluoride having a [111] crystal lattice direction substantially alignedwith said optical axis passing through said corresponding opticalelements.
 37. The optical system of claim 30, wherein said plurality ofcalcium fluoride lens elements have positions, shapes, and rotationalorientations about said respective optical axes so that less than about0.005 waves rms of retardance is produced by said plurality of calciumfluoride lens elements together.
 38. The optical system of claim 30,wherein said plurality of calcium fluoride lens elements comprises atleast 15 calcium fluoride lens elements.
 39. The optical system of claim30, wherein said plurality of calcium fluoride lens elements comprisesat least 25 calcium fluoride lens elements.
 40. The optical system ofclaim 30, wherein said plurality of calcium fluoride lens elementscomprises an optical photolithography system.